1999
DOI: 10.1002/(sici)1096-9918(199905/06)27:5/6<600::aid-sia508>3.0.co;2-w
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Quantitative material characterization by ultrasonic AFM

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Cited by 135 publications
(70 citation statements)
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“…This shift can either be used to measure quantitatively the local contact stiffness or to image variation in elastic properties. [6][7][8][9][10][11][12] By insonifying ultrasonic shear waves into the sample causing in-plane surface displacements, torsional resonances of the AFM cantilevers were excited, offering the possibility to gain information on frictional properties or shear elasticity. 2 Using a scanning interferometer, 13 we examined the vibration spectra of cantilevers made of single crystal silicon with approximately rectangular shape.…”
mentioning
confidence: 99%
“…This shift can either be used to measure quantitatively the local contact stiffness or to image variation in elastic properties. [6][7][8][9][10][11][12] By insonifying ultrasonic shear waves into the sample causing in-plane surface displacements, torsional resonances of the AFM cantilevers were excited, offering the possibility to gain information on frictional properties or shear elasticity. 2 Using a scanning interferometer, 13 we examined the vibration spectra of cantilevers made of single crystal silicon with approximately rectangular shape.…”
mentioning
confidence: 99%
“…The technique was first developed by Rabe and coworkers [RAB94,RAB95,RAB00] and is usually called atomic force acoustic microscopy (AFAM). A very similar method, called ultrasonic atomic force microscopy (UAFM), has been developed by Yamanaka et al [YAM96,YAM99].…”
Section: Linear Cantilever Spectroscopy Methodsmentioning
confidence: 99%
“…For clarity, we will limit the discussion to the approach used in AFAM. The specific details of the UAFM approach are somewhat different, although equally valid [YAM98,YAM99].…”
Section: Quantitative Techniquesmentioning
confidence: 99%
“…The AFM tip is then brought in contact with the sample surface. The cantilever-tip-sample system is set into oscillation, e.g., through piezoelectric actuator coupled with the back of the sample [29] or with the cantilever chip [30,31], through Schottky barrier depletion-layer actuation [32], or through photothermal excitation [33]. The contact between the sample and the tip, the latter placed at distance L 1 from the cantilever chip being L the cantilever length, can be modeled as the parallel between a spring with elastic constant k * and a dashpot of damping σ .…”
Section: Techniquementioning
confidence: 99%