Quantitative electron probe microanalysis using Gaussian ϕ(ρz) Curves

Abstract

The Gaussian expression for +(pz) has been used as the basis of a computer program for quantitative electron probe microanalysis. Corrections for absorption and atomic number are combined within the expression for +(pz) whereas the fluorescence correction is based on numerical integration over the primary and secondary intensities. Error histograms based on about 500 published analyses of standard specimens have been used to adjust the parameters in the Gaussian expression for optimum accuracy. The resultant error histograms are as narrow as those obtained for the most accurate of the current ZAF correction procedures. Extension of the method to non-normal electron incidence is relatively straightforward.

Thin film analysis by x‐ray microanalysis using gaussian Φ (ρ z) curves

“…several authors "optimized" these constants by using inicroprobe data of massive specimens in such a way that the best error histogram was obtained (Bastin et al 1984. Brown andPackwood 1982). A selection of the constants most suited for thin film analysis is given in a later section.…”

Quantitative x‐ray microanalysis of spherical inclusions embedded in a matrix using a SEM and Monte Carlo simulations

“…(1981) and by Scott and Love (1983). More recently, Brown and Packwood (1982) and Bastin ef a/. (1986) have developed a correction procedure based on the parametrization of +(pZ) curves.…”

Calculation and comparison of the backscattering factor R for characteristic x‐ray emission

“…Many of the correction models developed so far ( e g , see Bishop 1974, Love and Scott 1978, Pouchou and Pichoir 1986, Ruste 1979, Tanuma and Nagashima 1983, Sewell et al 1985 include the backscattering factor explicitly, although some others treat the absorption and the atomic number correction simultaneously (Bastin and Heijligers 1986a, b, Bastin et al 1984, Brown and Packwood 1982, Packwood and Brown 198 1, Parobek and Brown 1978, Tirira S a i et al 1987. Using k ratios, small errors of the values of the backscattering factor R do not falsify the results dramatically.…”