The backscattering factor R for characteristic radiation, which is a part of the atomic number correction commonly used in electron probe microanalysis, is calculated keeping mathematical simplifications at a minimum. The results are compared with the values calculated by means of three other often used expressions for the backscattering factor. It is shown that our results generally are similar to the ones of Duncumb and Reed and of Pouchou and Pichoir, but differ significantly from the ones of Love et al., whose expression seems not to be applicable if the overvoltage is higher than ∼50.
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