Quantifying low fluence ion implants in diamond-like carbon film by secondary ion mass spectrometry by understanding matrix effects

Jurewicz, A. J. G.; Olinger, C. T.; Burnett, D. S.; Guan, Yunbin; Hervig, R. L.; Rieck, K. D.; Woolum, D. S.

doi:10.1039/d0ja00375a

Cited by 3 publications

(19 citation statements)

References 20 publications

(99 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Herein, we correct for these effects using templates and SRIM models. Again, because ions do not appear to move after implantation into DLC, 8,12 SRIM appears to give excellent extrapolations of the SW depth profiles near the sample–epoxy interface. Some depth profiles appeared stretched, probably due to ion mixing or, perhaps, “smearing” (e.g.…”

Section: Methodsmentioning

confidence: 99%

“…In addition, a corrected back‐side analysis of the reference implant could be used as a template (scaled to match the intensity of the peak and sputtering rate) to accurately correct other depth profiles 12 . In many cases, the magnitude of these corrections was within ca 6% of a straight‐line extrapolation to the surface used as a preliminary estimate 8 …”

Section: Methodsmentioning

confidence: 99%

“…This difficulty is compounded by a further complication that – upon return to Earth – the solar wind collectors were shattered and their surfaces were exposed to terrestrial contaminants and spacecraft debris due to an unplanned, spectacular hard landing 4–6 . Many of the contaminants and debris could not be removed without risking damage to the precious, near‐surface SW sample 1,6–8 . Flight silicon collectors were easily etched at the nanometer scale by standard semiconductor cleaning techniques and this etching was clearly affected by the radiation damage caused by the SW implantation itself 7,9 .…”

Section: Introductionmentioning

confidence: 99%

“…Genesis DLC is an inhomogeneous materiala combination of graphite and diamond. In previous work on Mg isotopes in DLC, 8,12 we looked at the yield of ( 24 MgH + 25 Mg)/ 24 Mg versus the yield of 26 Mg/ 24 Mg. From our data we were able to infer that 24 MgH was not correlated with 25 Mg. Rather, its abundance appeared to be a function of the heterogeneous matrix.…”

mentioning

confidence: 99%

See 3 more Smart Citations

Depth profiling and standardization from the back side of a sample for accurate analyses: Emphasis on quantifying low‐fluence, shallow implants in diamond‐like carbon

Rieck

Jurewicz

Hervig

et al. 2023

Rapid Comm Mass Spectrometry

Self Cite

View full text Add to dashboard Cite

Back-side thinning of wafers is used to eliminate issues with transient sputtering when analyzing near-surface element distributions. Precise and accurate calibrated implants are created by including a standard reference material during the implantation. Combining these methods allows accurate analysis of low-fluence, shallow features even if matrix effects are a concern.Methods: Implanted Na (<2.0 Â 10 11 ions/cm 2 , peaking <50 nm) in diamond-like carbon (DLC) film on silicon (solar wind returned by NASA's Genesis mission) was prepared for measurement as follows. Implanted surfaces of samples were epoxied to wafers and back-side-thinned using physical or chemical methods. Thinned samples were then implanted with reference ions for accurate quantification of the solar wind implant. Analyses used a CAMECA IMS 7f-GEO SIMS in depthprofiling mode.Results: Back-side-implanted reference ions reduced the need to change sample mounts or stage position and could be spatially separated from the solar wind implant even when measuring monoisotopic ions. Matrix effects in DLC were mitigated and the need to find an identical piece of DLC for a reference implant was eliminated. Accuracy was only limited by the back-side technique itself.Conclusions: Combining back-side depth profiling with back-side-implanted internal standards aides quantification of shallow mono-and polyisotopic implants. This technique helps mitigate matrix effects and keeps measurement conditions consistent. Depth profile acquisition times are longer, but if sample matrices are homogeneous, procedural changes can decrease measurement times.

show abstract

Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

mentioning

confidence: 99%

See 2 more Smart Citations

Depth profiling and standardization from the back side of a sample for accurate analyses: Emphasis on quantifying low‐fluence, shallow implants in diamond‐like carbon

Rieck

Jurewicz

Hervig

et al. 2023

Rapid Comm Mass Spectrometry

Self Cite

View full text Add to dashboard Cite

show abstract

“…On the other hand, all of the material sputtered during the etching process is lost . In addition to the deterioration of the depth resolution and ion-bombardment-induced damage, the application of SIMS is also limited by the matrix effect and the nonconstant ionization yields. − The matrix effect is the effect of the substrate on the ionization probability of the particles emitted from the surface, both increasing or decreasing the ionization yield of either positive or negative secondary ions depending on the substrate from which they originate. − The matrix effect is particularly critical for (semi)quantitative analyses. ,, …”

Section: Introductionmentioning

confidence: 99%

ToF-SIMS Depth Profiling of Metal, Metal Oxide, and Alloy Multilayers in Atmospheres of H₂, C₂H₂, CO, and O₂

Ekar

Panjan

Drev³

et al. 2021

J. Am. Soc. Mass Spectrom.

View full text Add to dashboard Cite

The influence of the flooding gas during ToF-SIMS depth profiling was studied to reduce the matrix effect and improve the quality of the depth profiles. The profiles were measured on three multilayered samples prepared by PVD. They were composed of metal, metal oxide, and alloy layers. Dual-beam depth profiling was performed with 1 keV Cs + and 1 keV O 2 + sputter beams and analyzed with a Bi + primary beam. The novelty of this work was the application of H 2 , C 2 H 2 , CO, and O 2 atmospheres during SIMS depth profiling. Negative cluster secondary ions, formed from sputtered metals/metal oxides and the flooding gases, were analyzed. A systematic comparison and evaluation of the ToF-SIMS depth profiles were performed regarding the matrix effect, ionization probability, chemical sensitivity, sputtering rate, and depth resolution. We found that depth profiling in the C 2 H 2 , CO, and O 2 atmospheres has some advantages over UHV depth profiling, but it still lacks some of the information needed for an unambiguous determination of multilayered structures. The ToF-SIMS depth profiles were significantly improved during H 2 flooding in terms of matrix-effect reduction. The structures of all the samples were clearly resolved while measuring the intensity of the M n H m – , M n O m – , M n O m H – , and M n – cluster secondary ions. A further decrease in the matrix effect was obtained by normalization of the measured signals. The use of H 2 is proposed for the depth profiling of metal/metal oxide multilayers and alloys.

show abstract

Space Weathering of Genesis Mission Solar-wind Collectors with Inferences for Weathering on Airless Bodies

Jurewicz

Rieck

Olinger³

et al. 2023

Planet. Sci. J.

View full text Add to dashboard Cite

Samples from the Genesis Solar Wind Sample Return (NASA Discovery 5) are a unique opportunity to study the initial stages of space weathering, i.e., the physical and chemical effects of solar-wind irradiation. Arrays of collectors containing multiple materials were each exposed to a different solar-wind regime (fast, slow, bulk, or coronal mass ejection) at the L1 point for long durations (years). Materials exposed to the solar wind included metals, semiconductors, and insulators. Although the time of exposure was obviously short relative to samples having extraterrestrial origins, optical properties, surface chemical properties, and matrix structure have changed in many collectors due to exposure to solar wind. The thickness of amorphous zones, where present, appears to correspond with the depth of the peak of the solar-wind H distribution in each regime. Damage from high-energy particles was negligible because the collectors were 700 μm or less in thickness and shielded from the back by the spacecraft. Micrometeorite impacts and sputtering were also negligible because of the short exposure times. Our current results are preliminary: We hope future workers will extend this study both to support Genesis characterization efforts and to further understand space-weathering processes on a geologic timescale.

show abstract

Quantifying low fluence ion implants in diamond-like carbon film by secondary ion mass spectrometry by understanding matrix effects

Abstract: Secondary ion mass spectrometry (SIMS) data from diamond like carbon (DLC) often give inaccurate, imprecise results when methods tailored for silicon are applied. This work is a guide to accurate and precise results from future SIMS analyses of DLC.

Cited by 3 publications

References 20 publications

Depth profiling and standardization from the back side of a sample for accurate analyses: Emphasis on quantifying low‐fluence, shallow implants in diamond‐like carbon

Depth profiling and standardization from the back side of a sample for accurate analyses: Emphasis on quantifying low‐fluence, shallow implants in diamond‐like carbon

ToF-SIMS Depth Profiling of Metal, Metal Oxide, and Alloy Multilayers in Atmospheres of H₂, C₂H₂, CO, and O₂

Space Weathering of Genesis Mission Solar-wind Collectors with Inferences for Weathering on Airless Bodies

Contact Info

Product

Resources

About

Quantifying low fluence ion implants in diamond-like carbon film by secondary ion mass spectrometry by understanding matrix effects

Abstract: Secondary ion mass spectrometry (SIMS) data from diamond like carbon (DLC) often give inaccurate, imprecise results when methods tailored for silicon are applied. This work is a guide to accurate and precise results from future SIMS analyses of DLC.

Cited by 3 publications

References 20 publications

Depth profiling and standardization from the back side of a sample for accurate analyses: Emphasis on quantifying low‐fluence, shallow implants in diamond‐like carbon

Depth profiling and standardization from the back side of a sample for accurate analyses: Emphasis on quantifying low‐fluence, shallow implants in diamond‐like carbon

ToF-SIMS Depth Profiling of Metal, Metal Oxide, and Alloy Multilayers in Atmospheres of H2, C2H2, CO, and O2

Space Weathering of Genesis Mission Solar-wind Collectors with Inferences for Weathering on Airless Bodies

Contact Info

Product

Resources

About

ToF-SIMS Depth Profiling of Metal, Metal Oxide, and Alloy Multilayers in Atmospheres of H₂, C₂H₂, CO, and O₂