Quality Assurance methodology for the ATLAS Inner Tracker strip sensor production

Ullán, M.; Allport, P. P.; Dette, K.; Fadeyev, V.; Fernández-Tejero, J.; Fleta, C.; Kopsalis, I.; Orr, R. S.; Unno, Y.

doi:10.1016/j.nima.2020.164521

Cited by 11 publications

(10 citation statements)

References 12 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In this case, only non-irradiated and gamma-irradiated capacitors are measured (proton-and neutron-irradiated capacitors were too damaged to extract post-irradiation parameters). Inter-strip capacitance (C int ) and resistance (R int ) are obtained by direct measurement from interdigitated structures [2]. R int results (figure 3(b)) fulfil the specifications (R int > 15 MΩ).…”

Section: Results and Analysismentioning

confidence: 68%

“…In this paper, we focus on the Testchip and the MD8 test devices (figure 1) [2], and the analysis of the parameters measured for each one of these devices before and after neutron, proton or gamma irradiation. The ATLAS Testchip contains test structures to monitor specific deviceelement parameters.…”

Section: Description Of the Main Devicesmentioning

confidence: 99%

“…For the Testchip, the QA team focuses on pre-irradiated and irradiated samples up to a target Total Ionisation Dose (TID) of 66 Mrad [Si]. The MD8 measurements focus on pre-irradiated samples and on irradiated ones with a target neutron equivalent fluence [1] of 5 × 10 14 n eq /cm 2 . At least one Testchip and one MD8 are tested before and after irradiation for every batch.…”

Section: Measurement Principles and Implementationmentioning

confidence: 99%

See 2 more Smart Citations

Pre-production results from ATLAS ITk Strip Sensors Quality Assurance Testchip

Allport

Bach²,

Basso³

et al. 2022

J. Inst.

Self Cite

View full text Add to dashboard Cite

The production of strip sensors within the framework of the ATLAS Inner Tracker (ITk) development is a process which requires continuous evaluation during the full production period (about 4 years). Such an evaluation is divided into two different parts: Quality Control (QC), which focuses on the final product (the actual sensors) and tries to identify possible defects once the fabrication is completed, and Quality Assurance (QA), which aims to prevent deviations in the manufacturing process and uses specifically-designed test structures. The initial sensor pre-production consists of 5% (1041 sensors) of the total number of sensors expected during production. As part of pre-production, the collaboration has measured key parameters from miniature strip sensors (minis), monitor diodes (MD8), and the ATLAS Testchip, before and after irradiation. In this contribution we focus on the analysis of the results of the MD8 and the Testchip. All parameters have been obtained from the test structures (MD8, bias resistors, interdigitated structures, field oxide capacitors, coupling capacitors, punch-through protection structures and cross-bridge resistors) measured at the different test sites (KEK/Tsukuba, Birmingham, Toronto, Ljubljana, Valencia, Carleton, Prague, CNM-Barcelona). The results are compared to predefined pre- and post-irradiation specifications for each tested parameter.

show abstract

Section: Results and Analysismentioning

confidence: 68%

Section: Description Of the Main Devicesmentioning

confidence: 99%

Section: Measurement Principles and Implementationmentioning

confidence: 99%

See 1 more Smart Citation

Pre-production results from ATLAS ITk Strip Sensors Quality Assurance Testchip

Allport

Bach²,

Basso³

et al. 2022

J. Inst.

Self Cite

View full text Add to dashboard Cite

show abstract

“…One QA type, called "Mini & MD8", also contains a miniature strip sensor for measuring the signal size. Another one, called "TestChip & MD8", has a test chip with several structures for measuring technological parameters [10].…”

Section: Database Objectsmentioning

confidence: 99%

Monitoring Quality of ATLAS ITk Strip Sensors Through Database

Fadeyev¹,

Beránek²,

Bach³

et al. 2023

Proceedings of 10th International Workshop on Semiconductor Pixel Detectors for Particles and Imaging — PoS(Pixel2022)

View full text Add to dashboard Cite

The High-Luminosity LHC upgrade necessitates a complete replacement of the ATLAS Inner Detector with a larger all-silicon tracker. The strip portion of it covers 165 m 2 area, afforded by the strip sensors. Following several prototype iterations and a successful pre-production, a full-scale production started in 2021, to finish in 2025. It will include about 21,000 wafers and a factor of 5 higher throughput than pre-production, with about 500 sensors produced and tested per month. The transition to production stressed the need to evaluate the results from the Quality Control (QC) and Quality Assurance (QA) tests quickly to meet the monthly delivery schedule. The test data come from 15 collaborating institutes, therefore a highly distributed system with standardized interfaces was required. Specialized software layers of QA and QC Python code were developed against the backend of the ITk database (DB) for this purpose. The developments included particularities and special needs of the Strip Sensors community, such as the large variety of different test devices and test types, the necessary test formats, and different workflows at the test sites. Special attention was paid to techniques facilitating the development and user operations, for example creation of "parallel" sets of dummy DB objects for practice purposes, iterative verification of operability, and the automatic upload of test data. The scalability concerns and automation of the data handling were included in the system architecture from the very inception. The full suite of functionalities includes data integrity checks, data processing to extract and evaluate key parameters, cross-test comparisons, and summary reporting for continuous monitoring. We will also describe the lessons learned and the necessary evolution of the system.

show abstract

“…It is performed on the main sensors, which will be used in the ITk detector, and includes tests on every sensor (visual inspection, IV, CV and metrology) and tests on sample sensors (leakage current stability, full strip tests and detailed strip tests). QA includes the tests performed on miniature sensors and test structures before irradiation, the irradiation itself and tests after irradiation, of such components sampled from every production batch to provide confidence that the requirements are fulfilled through the whole production [4]. A summary of the participating QC and QA testing sites can be found in the Table 1…”

Section: Quality Assessment Programmentioning

confidence: 99%

Radiation-Hard Silicon Strip Sensors for the ATLAS Phase-2 Upgrade

Latoňová¹

2021

Proceedings of 40th International Conference on High Energy Physics — PoS(ICHEP2020)

View full text Add to dashboard Cite

The ATLAS upgrade for HL-LHC operation includes the installation of an entirely new all-silicon Inner Tracker (ITk). The silicon strip region comprises 165 m 2 of instrumented area, made possible by mass production of silicon strip sensors. This area is covered in a nearly hermetic way. Multiple sensor shapes are utilized: square sensors in the barrel part, and skewed trapezoidal sensors with curved edges to provide a continuous coverage of the disc surface in the endcap part of a detector. As a result, there are 8 different strip sensor types in the system. They all feature AC-coupled n +-in-p strips with polysilicon biasing, developed to withstand the total fluence of 1.6 • 10 15 n eq /cm 2 and the total ionizing dose of 66 Mrad. Following many years of R&D and 4 prototype submissions and evaluations, the project transitioned into pre-production, where 5 % of the total volume is produced in all 8 designs. In this contribution we will summarize the results obtained for the latest prototype sensors ATLAS17LS, a long-strip type sensor for the barrel part, the properties of which are expected to be comparable with the pre-production sensors.

show abstract

Quality Assurance methodology for the ATLAS Inner Tracker strip sensor production

Cited by 11 publications

References 12 publications

Pre-production results from ATLAS ITk Strip Sensors Quality Assurance Testchip

Pre-production results from ATLAS ITk Strip Sensors Quality Assurance Testchip

Monitoring Quality of ATLAS ITk Strip Sensors Through Database

Radiation-Hard Silicon Strip Sensors for the ATLAS Phase-2 Upgrade

Contact Info

Product

Resources

About