Abstract:The High-Luminosity LHC upgrade necessitates a complete replacement of the ATLAS Inner Detector with a larger all-silicon tracker. The strip portion of it covers 165 m 2 area, afforded by the strip sensors. Following several prototype iterations and a successful pre-production, a full-scale production started in 2021, to finish in 2025. It will include about 21,000 wafers and a factor of 5 higher throughput than pre-production, with about 500 sensors produced and tested per month. The transition to production … Show more
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