Pyroelectric thin-film sensor array

Köhli, Markus; Wuethrich, Christian; Brooks, Keith G.; Willing, B.; Förster, Martin; Muralt, Paul; Setter, N.; Ryser, Peter

doi:10.1016/s0924-4247(97)01484-2

Cited by 124 publications

(54 citation statements)

References 8 publications

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“…The influence of the seed layer is stronger than that of process parameters such as pyrolysis and annealing temperature, heating rates, and lead excess, which usually are the parameters optimized for orientation control [6]. This seed layer already has been successfully applied for the fabrication of pyroelectric devices [12].…”

Section: Introductionmentioning

confidence: 99%

Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding

Muralt

Maeder

Sagalowicz

et al. 1998

Journal of Applied Physics

264

131

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The nature and the role of 1 to 5 nm thick TiO 2 seed layers for the growth of textured PbTiO 3 and Pb(Zr,Ti)O 3 thin films on textured Pt(111) thin film substrates have been studied. Under otherwise identical in situ sputter deposition process conditions, the PbTiO 3 texture could be turned from (100) to (111) orientation by adding the seed layer. This is demonstrated by patterning the TiO 2 film. Auger electron spectroscopy and x-ray photoemission spectroscopy showed that the seed layer was a continuous TiO 2 film. X-ray photoelectron diffraction measurements revealed epitaxial ordering in the seed layer. As there is no azimuthal order among the Pt grains, the reduced information of azimuthally averaged polar cuts is obtained. These give strong evidence for a strained rutile (110) structure. Various deposition experiments indicated that the TiO 2 is effective only when it is ordered before the PbTiO 3 nucleation starts. The epitaxial relationship between PbTiO 3 (111) and Pt(111) is thus mediated by the intermediate, epitaxial TiO 2 film, which is dissolved or transformed to PbTiO 3 afterwards. The observed growth behavior is discussed in terms of surface and interface energies.

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Section: Introductionmentioning

confidence: 99%

Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding

Muralt

Maeder

Sagalowicz

et al. 1998

Journal of Applied Physics

264

131

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show abstract

“…The recent development of ferroelectric thin films of the Pb(Zr,Ti)O 3 (PZT) family for memory [1], piezoelectric [2] and pyroelectric [3,4] devices has drawn considerable interest to integration issues. The prime concern is bottom electrode stability against the conditions prevailing during PZT film in-situ growth or crystallization annealing: oxidizing ambients and the presence of lead oxide at high temperatures (550-700°C).…”

Section: Introductionmentioning

confidence: 99%

Stabilized Platinum Electrodes for Ferroelectric Film Deposition using Ti, Ta and Zr Adhesion Layers

Maeder¹,

Sagalowicz²,

Muralt³

1998

Jpn. J. Appl. Phys.

112

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Pt-based metallizations using different adhesion layers (Ti, Zr and Ta) were studied for use as electrodes for ferroelectric thin films on oxidized silicon substrates. Different ways of oxidizing the adhesion layers prior to ferroelectric film growth are compared, with regard to obtaining stable, adherent Pt films of well-defined (111) orientation, while avoiding lead diffusion through the electrode. Upon in-situ deposition of PbTiO 3 at high excess lead flux, lead diffusion through the Pt film was found to depend strongly on the adhesion layer and the stabilization treatment. Pre-oxidation reduces lead diffusion during the later processing. Ti diffuses through the electrode for oxidation reaction, whereas Ta and Zr stay in place, in analogy to the diffusivities in the corresponding oxides. A novel oxidation treatment was developed to produce stable, adherent metallizations with controlled orientation and good barrier properties against lead diffusion.

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“…To obtain an optimal pyroelectric effect, a poling process is required. This is an important step for pyroelectric devices [1,2].…”

Section: Introductionmentioning

confidence: 99%

Study of poling methods for multilayer pyroelectric thin film infrared detectors

Zhang

et al. 2007

J Electroceram

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The multilayer pyroelectric thin film infrared detector arrays were prepared by a metallo-organic compound decomposition method. A DC poling and a pulse poling methods have been investigated to reduce the poling time and improve the poling efficiency of pixels of an uncooled infrared focal plane array. It's found that the efficiency of the DC poling increased by 20% via optimizing the poling conditions. While the efficiency of the pulse poling increased by over 31%. Compared with the DC poling, the pulse poling can improve poling efficiency and reduce the poling time significantly. Furthermore, a stepwise pulse field can reduce the breakdown of thin films during poling.

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Pyroelectric thin-film sensor array

Cited by 124 publications

References 8 publications

Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding

Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding

Stabilized Platinum Electrodes for Ferroelectric Film Deposition using Ti, Ta and Zr Adhesion Layers

Study of poling methods for multilayer pyroelectric thin film infrared detectors

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