Pyramid microstructure with single walled carbon nanotubes for flexible and transparent micro-pressure sensor with ultra-high sensitivity

Huang, Zhenlong; Gao, Min; Yan, Zhuocheng; Pan, Taisong; Khan, Saeed Ahmed; Zhang, Yin; Zhang, Hulin

doi:10.1016/j.sna.2017.09.054

Cited by 73 publications

(59 citation statements)

References 34 publications

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“…Single-sided microstructured films have been widely employed to enhance the performance of flexible pressure sensors 10,14,17,32 and triboelectric generators 11,22 . For pressure-sensitive piezoresistance, a flat indium tin oxide (ITO) film was used as the top electrode on the surface of micropatterned composite films (Fig.…”

Section: Multidirectional Force-sensing Capabilities Of Microstructurmentioning

confidence: 99%

Tailoring force sensitivity and selectivity by microstructure engineering of multidirectional electronic skins

et al. 2018

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Electronic skins (e-skins) with high sensitivity to multidirectional mechanical stimuli are crucial for healthcare monitoring devices, robotics, and wearable sensors. In this study, we present piezoresistive e-skins with tunable force sensitivity and selectivity to multidirectional forces through the engineered microstructure geometries (i.e., dome, pyramid, and pillar). Depending on the microstructure geometry, distinct variations in contact area and localized stress distribution are observed under different mechanical forces (i.e., normal, shear, stretching, and bending), which critically affect the force sensitivity, selectivity, response/relaxation time, and mechanical stability of e-skins. Microdome structures present the best force sensitivities for normal, tensile, and bending stresses. In particular, microdome structures exhibit extremely high pressure sensitivities over broad pressure ranges (47,062 kPa −1 in the range of <1 kPa, 90,657 kPa −1 in the range of 1-10 kPa, and 30,214 kPa −1 in the range of 10-26 kPa). On the other hand, for shear stress, micropillar structures exhibit the highest sensitivity. As proof-of-concept applications in healthcare monitoring devices, we show that our e-skins can precisely monitor acoustic waves, breathing, and human artery/carotid pulse pressures. Unveiling the relationship between the microstructure geometry of e-skins and their sensing capability would provide a platform for future development of high-performance microstructured e-skins.

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Section: Multidirectional Force-sensing Capabilities Of Microstructurmentioning

confidence: 99%

Tailoring force sensitivity and selectivity by microstructure engineering of multidirectional electronic skins

et al. 2018

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“…Furtherly, the pressure sensors based on various sensing materials such as triboelectric nanogenerator by Liu et al and flexible ferroelectric skins by Park et al were prepared to discriminate static/dynamic change arising from surface textures, respectively. However, for demonstrating the capability of recording the texture, the main insufficient issue of previous researches contain: one is lack of more detailed discussion about the relation between the output signal and the surface information especially the soft surface stripes of fabric, which can be used to establish the capability of predicting the dimensions of unknown fabric in future; and the other is the above reported human fingertips still have the limits and cannot accurately distinguish ultrafine surface microtexture, such as micropatterns of the fabric or microstripes with periodic structure <100 µm, etc., because the smooth outside surface of the flexible substrate are insufficiently sensitive to sense the small structural variations of the microtexture (as discussed in Figure b) . Hence, to develop a novel pressure sensor with favorable structure and high sensitivity, a significant study is required to detailedly analyze the relation between the output signal and the soft surface stripes of fabric with periodic structure <100 µm.…”

Section: Introductionmentioning

confidence: 99%

Fingerprint‐Inspired Flexible Tactile Sensor for Accurately Discerning Surface Texture

Cao

et al. 2018

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Inspired by the epidermal-dermal and outer microstructures of the human fingerprint, a novel flexible sensor device is designed to improve haptic perception and surface texture recognition, which is consisted of single-walled carbon nanotubes, polyethylene, and polydimethylsiloxane with interlocked and outer micropyramid arrays. The sensor shows high pressure sensitivity (-3.26 kPa in the pressure range of 0-300 Pa), and it can detect the shear force changes induced by the dynamic interaction between the outer micropyramid structure on the sensor and the tested material surface, and the minimum dimension of the microstripe that can be discerned is as low as 15 µm × 15 µm (interval × width). To demonstrate the texture discrimination capability, the sensors are tested for accurately discerning various surface textures, such as the textures of different fabrics, Braille characters, the inverted pyramid patterns, which will have great potential in robot skins and haptic perception, etc.

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“…Micropillar‐based e‐skins showed higher sensitivity over pressure and shear compared to planar e‐skins. Whereas the microscale pyramids and pillars were harnessed to increase sensitivity to normal and shear stresses, microwrinkle‐based e‐skin could improve sensitivity for normal and tensile stresses, as the regularly buckled geometry of the microwrinkles enables increased stretchability, similar to hierarchical wrinkles and folds in human skin . These results demonstrate that the sensing capability of various e‐skins can be enhanced by integrating functional nanomaterials with proper microscopic architectures .…”

Section: Introductionmentioning

confidence: 84%

Hybrid Architectures of Heterogeneous Carbon Nanotube Composite Microstructures Enable Multiaxial Strain Perception with High Sensitivity and Ultrabroad Sensing Range

Sun

Park

et al. 2018

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The ORCID identification number(s) for the author(s) of this article can be found under https://doi.org/10.1002/smll.201803411.Low-dimensional nanomaterials are widely adopted as active sensing elements for electronic skins. When the nanomaterials are integrated with microscale architectures, the performance of the electronic skin is significantly altered. Here, it is shown that a high-performance flexible and stretchable electronic skin can be produced by incorporating a piezoresistive carbon nanotube composite into a hierarchical topography of micropillar-wrinkle hybrid architectures that mimic wrinkles and folds in human skin. Owing to the unique hierarchical topography of the hybrid architectures, the hybrid electronic skin exhibits versatile and superior sensing performance, which includes multiaxial force detection (normal, bending, and tensile stresses), remarkable sensitivity (20.9 kPa −1 , 17.7 mm −1 , and gauge factor of 707 each for normal, bending, and tensile stresses), ultrabroad sensing range (normal stress = 0-270 kPa, bending radius of curvature = 1-6.5 mm, and tensile strain = 0-50%), sensing tunability, fast response time (24 ms), and high durability (>10 000 cycles). Measurements of spatial distributions of diverse mechanical stimuli are also demonstrated with the multipixel electronic skin. The stress-strain behavior of the hybrid structure is investigated by finite element analysis to elucidate the underlying principle of the superior sensing performance of the electronic skin. Electronic Skins www.advancedsciencenews.com

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Pyramid microstructure with single walled carbon nanotubes for flexible and transparent micro-pressure sensor with ultra-high sensitivity

Cited by 73 publications

References 34 publications

Tailoring force sensitivity and selectivity by microstructure engineering of multidirectional electronic skins

Tailoring force sensitivity and selectivity by microstructure engineering of multidirectional electronic skins

Fingerprint‐Inspired Flexible Tactile Sensor for Accurately Discerning Surface Texture

Hybrid Architectures of Heterogeneous Carbon Nanotube Composite Microstructures Enable Multiaxial Strain Perception with High Sensitivity and Ultrabroad Sensing Range

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