A numerical model of surface-wave-produced plasmas in a diffusion-controlled regime is presented in this study. With the wide gas-pressure range (p=0.05–5 Torr) considered in a combination with a frequency (f=144 MHz) in the rf-range, the model covers discharge maintenance under different conditions with respect to mechanisms of electron heating and discharge self-consistency. The precise description of the wave dispersion properties and field distribution in inhomogeneous collisional plasmas included in the electrodynamical part of the model and the specification of the discharge kinetics in its gas-discharge part provide the quantitative description of the discharge production. The model results in the self-consistent structure of the discharge composed by interrelated variations, along the discharge, of wave number, damping rate, field distribution, power absorbed in average by an electron, plasma density, electron temperature, and Joule heating. The total absorbed power finally obtained in its relation to the discharge length is the power which should be externally applied for the discharge maintenance.