Pulsed rf-GD-TOFMS for depth profile analysis of ultrathin layers using the analyte prepeak region

Pisonero, Jorge; Valledor, Rebeca; Licciardello, A.; Quirós, C.; Martín, José Ignacio; Sanz‐Medel, Alfredo; Bordel, Nerea

doi:10.1007/s00216-011-5601-3

Cited by 16 publications

(14 citation statements)

References 26 publications

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“…Thus, RSFs are widely implemented for calibration, which significantly simplifies the quantification compared with, for example, SIMS (Konarski et al, 2008). GDMS is applicable for depth analysis of both thin films and multilayer coatings with good spatial resolution and scanning speed (Pisonero et al, 2006, 2012, 2019; Lobo, Fernández, & Pereiro, 2017).…”

Section: Gdmsmentioning

confidence: 99%

Mass Spectrometry‐based Techniques for Direct Quantification of High Ionization Energy Elements in Solid Materials—challenges and Perspectives

Gubal

Chuchina

Sorokina

et al. 2020

Mass Spectrometry Reviews

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The determination of nonmetals, first of all, the most electronegative ones—nitrogen, oxygen, fluorine, chlorine, and bromine, poses the highest challenge for element analysis. These elements are characterized by high reactivity, volatility, high ionization energy, and the absence of intensive spectral lines in the optical spectral range. Conventional techniques of their quantification include considerable “wet chemistry” stages so the application of these techniques for the solid sample is highly laborious and prone to uncontrollable uncertainties. Additionally, current development in material science and other areas requires the quantification of the elements at lower levels with good sensitivity. Owing to their robustness and flexibility, mass spectrometry techniques provide vast possibilities for the quantification, spatial and isotopic analysis, including the solutions for direct analysis of solids. The current review focuses on the application of major mass spectrometric techniques for the quantification of N, O, F, Cl, and Br in solid samples. The following techniques are mainly considered: thermal ionization mass spectrometry (TIMS), isotope‐ratio MS (IRMS), secondary ion MS (SIMS), inductively coupled plasma MS (ICP‐MS), and glow discharge MS (GDMS); as the most accessible and widely applied for the purpose. General ionization issues, advantages, limitations, and novel methodological solutions are discussed. © 2020 John Wiley & Sons Ltd.

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Section: Gdmsmentioning

confidence: 99%

Mass Spectrometry‐based Techniques for Direct Quantification of High Ionization Energy Elements in Solid Materials—challenges and Perspectives

Gubal

Chuchina

Sorokina

et al. 2020

Mass Spectrometry Reviews

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“…This option was further studied using three different samples: the NIST 621 glass (10.7% Ca, 72.13% Si), the NIST 93A glass (0.01% Ca, 80.8% Si) and also a conductive 151X-FCA4 stainless steel (0% Ca, 0.01% Si). Considering previous experiments carried out in our group, 8 we investigated the prepeak region for 44 Ca measurements as well (measurement in such time region may keep polyatomic interferences at a minimum). In our case, we tried here to measure at 0.15 ms aer the pulse start.…”

Section: Interference Removal Studiesmentioning

confidence: 99%

Pulsed radiofrequency glow discharge time of flight mass spectrometry for coated glass analysis

Bouza

Pereiro

Bordel

et al. 2015

J. Anal. At. Spectrom.

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The analytical potential of radiofrequency pulsed glow discharge time of flight mass spectrometry (rf-PGDToFMS) is investigated for quantitative depth profiling analysis of glasses and thin conductive and nonconductive layers on glasses. PGD in combination with ToFMS can allow the reduction or even removal of spectral interferences by selecting a proper GD pulse interval. Thus, discrimination of potential polyatomic interferences for several analytes (e.g., 28 Si + , 39 K + , 44 Ca + , and 48 Ti + ) was investigated by selecting appropriate time positions along the GD pulse profile. In this paper, the determination of compositional depth profiles of coated glasses was performed by resorting to a multi-matrix calibration procedure. For this purpose, conductive as well as non-conductive certified reference materials were employed to build the analytical calibration curves. Results show that rf-PGD-ToFMS allows us to discriminate the different layers of the samples and the nominal values for element concentrations and layer thicknesses were in agreement with experimental results obtained using the proposed quantification strategy. Moreover, the capability of rf-PGD-ToFMS to provide a full mass spectrum every 33 ms enable the identification of unexpected elements which can be present as contaminants in very thin layers (e.g. Cd, Sn, Te and Sb).

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“…1 Particularly, the rf-GD-MS has offered efficient depth profile analysis of different materials, such as glass, ceramics and new composite materials, thus widening its applications. [2][3][4][5][6][7][8][9][10][11][12][13] Generally, the principles of rf glow discharge is similar to direct current glow discharge in many respects. However, as an AC potential is applied in an rf-GD process, electrical insulating samples can be effectively sputtered.…”

Section: Introductionmentioning

confidence: 99%

Signal Enhancement with Stacked Magnets for High-Resolution Radio Frequency Glow Discharge Mass Spectrometry

et al. 2017

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ABSTRACT:A method for signal enhancement utilizing stacked magnets was introduced into high-resolution radio frequency glow discharge-mass spectrometry (rf-GD-MS) for significantly improved analysis of inorganic materials. Compared to the block magnet, the stacked magnets method was able to achieve 50−59% signal enhancement for typical elements in Y2O3, BSO, and BTN samples. The results indicated that signal was enhanced as the increase of discharge pressure from 1.3 to 8.0 mPa, the increase of rf-power from 10 to 50 W with a frequency of 13.56 MHz, the decrease of sample thickness, and the increase of number of stacked magnets. The possible mechanism for the signal enhancement was further probed using the software "Mechanical APDL (ANSYS) 14.0". It was found that the distinct oscillated magnetic field distribution from the stacked magnets was responsible for signal enhancement, which could extend the movement trajectories of electrons and increase the collisions between the electrons and neutral particles to increase the ionization efficiency. Two NIST samples were used for the validation of the method, and the results suggested that relative errors were within 13% and detection limit for six transverse stacked magnets could reach as low as 0.0082 μg g −1 . Additionally, the stability of the method was also studied. RSD within 15% of the elements in three nonconducting samples could be obtained during the sputtering process. Together, the results showed that the signal enhancement method with stacked magnets could offer great promises in providing a sensitive, stable, and facile solution for analyzing the nonconducting materials.

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Pulsed rf-GD-TOFMS for depth profile analysis of ultrathin layers using the analyte prepeak region

Cited by 16 publications

References 26 publications

Mass Spectrometry‐based Techniques for Direct Quantification of High Ionization Energy Elements in Solid Materials—challenges and Perspectives

Mass Spectrometry‐based Techniques for Direct Quantification of High Ionization Energy Elements in Solid Materials—challenges and Perspectives

Pulsed radiofrequency glow discharge time of flight mass spectrometry for coated glass analysis

Signal Enhancement with Stacked Magnets for High-Resolution Radio Frequency Glow Discharge Mass Spectrometry

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