Pulsed‐laser deposition of ZnS and SrS for ACTFEL and field‐emission displays

Abstract

Abstract— High‐quality luminescent thin films of manganese‐doped zinc sulphide (ZnS: Mn) and strontium sulphide (SrS) with excellent stoichiometry have been grown by pulsed‐laser deposition (PLD). The crystallinity, stoichiometry, and cathodoluminescence have been investigated for films deposited onto two different substrate types under different deposition conditions. Furthermore, the importance of post‐deposition annealing has been studied. PLD ZnS: Mn thin films show increased cathodoluminescence (CL) when compared to sputtered thin films, peaking at 585 nm. SrS thin films grown at 450°C onto tin‐doped indium oxide (ITO) coated glass substrates show very good crystallinity, with a preferred orientation along the (200) axis. Cerium‐doped strontium sulphide (SrS: Ce) gives strong blue CL output at 400 nm. The films are stoichiometric and it has been shown that the stoichiometry is controllable by varying the deposition parameters.

Pulsed laser deposition from ZnS and Cu2SnS3 multicomponent targets

“…It is therefore possible to grow films which otherwise would require a much higher substrate temperature, and which grow under strong non-equilibrium conditions. Even for compounds with volatile elements the thin films usually exhibit optical, electronic and structural properties similar to the bulk [4][5][6][7]. However, for some materials with volatile components such as oxygen or sulfur, a part of the volatile fraction may be lost during the transfer to the substrate or during the film growth [2,8], which, for example, for oxides may lead to "metallic" rather than oxide films [9].…”