Pulsed ion beam irradiation of silicon

Chu, Wei‐Kan; Mäder, Sebastian; Gorey, E. F.; Baglin, J. E. E.; Hodgson, R. T.; Neri, J. M.; Hammer, D. A.

doi:10.1016/0029-554x(82)90561-4

Cited by 20 publications

(3 citation statements)

References 7 publications

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“…In the case of lithium ions, resulting range profiles can be impacted by fast diffusion at elevated sample temperatures. In silicon crystals this can be expected for energy fluences >0.1 J/cm 2 [23][24][25].…”

Section: Discussion Of Defect Dynamics Studies Enabled By Short Ion Bmentioning

confidence: 91%

“…reducing channeling in crystalline target materials. Use of very intense, short ion beam pulses has also been explored for semiconductor processing, such as simultaneous implantation and annealing [23][24][25]. In NDCX-II, the ion beam is transported through a beam line with a series of acceleration and beam shaping elements, leading to pure Li + beams with tunable angular divergence.…”

Section: Discussion Of Defect Dynamics Studies Enabled By Short Ion B...mentioning

confidence: 99%

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Towards pump–probe experiments of defect dynamics with short ion beam pulses

Schenkel

Lidia

Weis

et al. 2013

Nuclear Instruments and Methods in Physics Research Section B:

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A novel, induction type linear accelerator, the Neutralized Drift Compression eXperiment (NDCX-II), is currently being commissioned at Berkeley Lab. This accelerator is designed to deliver intense (up to 3x10 11 ions/pulse), 0.6 to ~600 ns duration pulses of 0.13 to 1.2 MeV lithium ions at a rate of about 2 pulses per minute onto 1 to 10 mm scale target areas. When focused to mm-diameter spots, the beam is predicted to volumetrically heat micrometer thick foils to temperatures of ~30,000 K. At lower beam power densities, the short excitation pulse with tunable intensity and time profile enables pump-probe type studies of defect dynamics in a broad range of materials. We briefly describe the accelerator concept and design, present results from beam pulse shaping experiments and discuss examples of pump-probe type studies of defect 2 dynamics following irradiation of materials with intense, short ion beam pulses from NDCX-II. IntroductionIntense, short pulses of energetic ions are highly desirable for studies of warm dense matter, high energy density physics experiments with volumetrically heated targets, and for studies of defect dynamics in solids [1,2]. Irradiation with short ion beam pulses generates defects in a narrow time window and their diffusion and recombination dynamics can then be studied in time resolved "pump -probe" type experiments. Here, the short ion beam pulse acts as the "pump" which can be followed by a suitable "probe" beam, such as an x-ray pulse, which can track a selected defect signature. Combining a short pulse ion beam capability with pulsed probe beams from an x-ray free electron laser (FEL) was recently proposed for the study of radiation effects in nuclear materials by Froideval et al [1]. Suitable driver beams can be formed through longitudinal compression of space-charge dominated ion beams where short pulses have been achieved by imposing head-to-tail velocity tilts to drifting ion beams [2][3][4]. High drift compression factors are reached when ion beams traveled through a neutralizing plasma column during drift compression. Earlier, a 25 mA, 300 keV K + beam was compressed 50 to 90 fold, yielding an intense ~3 ns long pulse with a beam spot size of ~1 mm 2 [4]. In order to achieve uniform heating of micrometer thick foil targets to temperatures of 2 -3 eV, we are currently implementing this beam compression concept with increased ion beam energy (up to 1.2 MeV)for lithium ions [3,5]. The induction linac based accelerator affords a high degree of flexibility in ion beam pulse shaping. In an intensity regime well below the onset of intense target heating 3 and hydrodynamic motion, this flexibility enables the study of defect dynamics in solids and other materials (including soft matter and liquids). Here, targets can be exposed to short ion beam pulses and resulting defect structures can be probed with time-resolved in situ or with ex situ methods. This article is structured as follows: We first present results from ion beam pulse control experiments at NDCX-II in Section 2. We t...

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Section: Discussion Of Defect Dynamics Studies Enabled By Short Ion Bmentioning

confidence: 91%

Section: Discussion Of Defect Dynamics Studies Enabled By Short Ion B...mentioning

confidence: 99%

Towards pump–probe experiments of defect dynamics with short ion beam pulses

Schenkel

Lidia

Weis

et al. 2013

Nuclear Instruments and Methods in Physics Research Section B:

View full text Add to dashboard Cite

show abstract

“…Recently, however, these ion beams with ion energies from 50 keV to 10 MeV, ion currents from 1 kA to 10 MA, and pulse durations from 10 to 1000 ns have been finding new applications in diverse fields such as materials processing [4], [5]. Because of the short range of the ions in matter, its application usually involves the surface modification of materials, e.g., implantation [6], alloy mixing [7], [8], defect formation [9], [10], and thin-film deposition [11], [12]. For many of these applications, these beams are used primarily as heat sources to ablate or rapidly melt solid targets.…”

Section: Introductionmentioning

confidence: 99%

Characteristic Observation of Intense Pulsed Aluminum Ion Beam in Magnetically Insulated Ion Diode With Vacuum Arc Ion Source

Ito

Fujikawa

Miyake

et al. 2009

IEEE Trans. Plasma Sci.

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Intense pulsed heavy ion beam has been developed for a range of applications, including materials processing, particle accelerator injection for fundamental nuclear physics research, and other fundamental and applied purposes. For those applications, it is very important to generate high-purity ion beams with various ion species. We have developed a magnetically insulated ion diode for the generation of intense pulsed metallic ion beams in which the vacuum arc plasma gun is used as the metal ion source. The ion diode was operated at a diode voltage of about 200 kV, a diode current of about 15 kA, and a pulse duration of about 100 ns, and an ion beam with an ion current density of > 200 A/cm 2 and a pulse duration of 40 ns was obtained at 50 mm downstream from the anode. By evaluating the ion species and the energy spectrum of the ion beam via a Thomson parabola spectrometer, it was confirmed that the ion beam consists of aluminum ions (Al + , Al 2+ , and Al 3+ ) of energy 60-740 keV and proton impurities of energy 90-150 keV. The purity of the beam was estimated to be 89%, which is much higher than that of the pulsed ion beam produced in the conventional ion diode.Index Terms-Intense pulsed heavy ion beam, magnetically insulated ion diode (MID), pulsed power technology, vacuum arc plasma gun.

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