ProTEK PSB coating as an alternative polymeric protection mask for KOH bulk etching of silicon

Rahim, Rosminazuin Ab; Bais, Badariah; Majlis, Burhanuddin Yeop; Sugandi, Gandi

doi:10.1007/s00542-013-1794-z

Cited by 11 publications

(5 citation statements)

References 10 publications

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“…Firstly, the photolithography process was carried out on the top side of the wafer to define the microconcentrator design (step A) by using a specific negative-working photosensitive resist ProTEK® PSB (Brewer Science). The main feature of ProTEK® is its non-degradable character under alkaline etching conditions [48]. This property reveals essential for the herein proposed fabrication scheme due to the photosensitive coating has to support strong alkaline conditions during KOH etching (step B) and zeolite synthesis (step C).…”

Section: Microfabrication Processmentioning

confidence: 99%

Zeolite based microconcentrators for volatile organic compounds sensing at trace-level: fabrication and performance

Almazan

Pellejero

Morales

et al. 2016

J. Micromech. Microeng.

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A novel 6-step microfabrication process is proposed in this work to prepare microfluidic devices with integrated zeolite layers. In particular, microfabricated preconcentrators designed for volatile organic compounds (VOC) sensing applications are fully described. The main novelty of this work is the integration of the pure siliceous MFI type zeolite (silicalite-1) polycrystalline layer, i.e 4.0 ± 0.5 µm thick, as active phase, within the microfabrication process just before the anodic bonding step. Following this new procedure, Si microdevices with an excellent distribution of the adsorbent material, integrated resistive heaters and Pyrex caps have been obtained. Firstly, the microconcentrator performance has been assessed by means of the normal hexane breakthrough curves as a function of sampling and desorption flowrates, temperature and micropreconcentrator design. In a step further, the best preconcentrator device has been tested in combination with downstream Si based microcantilevers deployed as VOC detectors. Thus, a preliminar evaluation of the improvement on detection sensitivity by silicalite-1 based microconcentrators is presented.

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Section: Microfabrication Processmentioning

confidence: 99%

Zeolite based microconcentrators for volatile organic compounds sensing at trace-level: fabrication and performance

Almazan

Pellejero

Morales

et al. 2016

J. Micromech. Microeng.

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“…This is achieved by initially defining the etching regions by optical lithography on the wafer's backside (using resist Map-1215) and by the backside Si 3 N 4 removal with RIE. A protective coating (Protek B3) [23,25] is spun on the wafer's electrodes to protect them during the KOH etch. After the KOH etch, 50 μm of silicon is left and removed by a dry etch in the Viper tool.…”

Section: Nanofabricationmentioning

confidence: 99%

Scalable nanophotonic neural probes for multicolor and on-demand light delivery in brain tissue

et al. 2021

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Neural probes are in vivo brain-invasive devices that record and manipulate neural circuits using electricity, light, or drugs. The capability to shine distinct wavelengths and control their respective output locations for activation or deactivation of specific groups of neurons is desirable but remains unachieved. Here, we discuss our probe’s capability to deliver two independently controllable wavelengths (450 and 655 nm) in the location(s) of interest using nanophotonic directional couplers and ring resonators. These nanophotonics are scalable to dozens of outputs without significantly increasing the device’s lateral dimensions. Furthermore, they are entirely passive and thus do not require electrical input that results in heat generation. Besides, we integrate a high number of electrodes for a simultaneous neural activity readout. Thus, we overcome the challenges associated with multicolor illumination for neural devices by exploiting the capability of miniaturizable, passive probes to deliver two different frequencies in several areas of interest. These devices open the path towards investigating the in vivo electrical signal propagation under the individual or simultaneous activation or inhibition of distinct brain regions.

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“…To do so, we performed a wet etch in potassium hydroxide using the backside nitride as a mask while protecting the wafer's frontwhere electrodes and wires are-with a 20 μm thick Protek B3 layer. 36 Once we obtained the photonic and electrical circuits on 25 μm thick membranes, we evaporated 30 nm of Chrome on the wafer's back. Finally, we released the devices by dry etching their shape from the wafer's front side and using a 40 μm thick photoresist (AZ 40 XT 11D) mask with 100 μm wide trenches [Figs.…”

Section: B Probe Nanofabricationmentioning

confidence: 99%

Neural optoelectrodes merging semiconductor scalability with polymeric-like bendability for low damage acute in vivo neuron readout and stimulation

Lanzio

Gutierrez

Hermiz

et al. 2021

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Neural optoelectrodes can read and manipulate large numbers of neurons in vivo. However, state-of-the-art devices rely on either standard microfabrication materials (i.e., silicon and silicon nitride), which result in high scalability and throughput but cause severe brain damage due to implant stiffness, or polymeric devices, which are more compliant but whose scalability and implantation in the brain are challenging. Here, we merge the gap between silicon-based fabrication scalability and low (polymeric-like) stiffness by fabricating a nitride and oxide-based optoelectrode with a high density of sensing microelectrodes, passive photonic circuits, and a very small tip thickness (5 μm). We achieve this by removing all the silicon supporting material underneath the probe's tip-while leaving only the nitride and glass optical ultrathin layers-through a single isotropic etch step. Our optoelectrode integrates 64 electrodes and multiple passive optical outputs, resulting in a cross-sectional area coefficient (the cross section divided by the number of sensors and light emitters) of 3.1-smaller than other optoelectrodes. It also combines a low bending stiffness (∼4.4 × 10 −11 N m 2 ), comparable or approaching several state-of-the-art polymeric optoelectrodes. We tested several mechanical insertions of our devices in vivo in rats and demonstrated that we can pierce the pia without using additional temporary supports.

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ProTEK PSB coating as an alternative polymeric protection mask for KOH bulk etching of silicon

Cited by 11 publications

References 10 publications

Zeolite based microconcentrators for volatile organic compounds sensing at trace-level: fabrication and performance

Zeolite based microconcentrators for volatile organic compounds sensing at trace-level: fabrication and performance

Scalable nanophotonic neural probes for multicolor and on-demand light delivery in brain tissue

Neural optoelectrodes merging semiconductor scalability with polymeric-like bendability for low damage acute in vivo neuron readout and stimulation

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