Characterizations of InN films on Si (111) substrate grown by metal-organic chemical vapor deposition with a predeposited In layer and a two-step growth method J. Vac. Sci. Technol. A 25, 701 (2007); 10.1116/1.2740293
Intergranular interactions of low temperature atmosphere annealed Co ∕ Pd magnetic multilayersAn efficient process for direct pattern writing of thin metallic films has been developed using a 121.6 nm vacuum ultraviolet source by photodissociation of metalorganic materials. The optical reflection, crystal structure, and surface morphology of photodissociated palladium thin films were studied using a spectrophotometer, x-ray diffraction, and scanning electron microscopy. A pattern of 5 m palladium lines separated by 5 m spaces was produced on glass substrate by contact printing lithography.