Proposal of Non-Cylindrical and Large-Area RF Plasma Productions by Surface Wave

Travelling-wave-sustained discharges

“…The application-orientated research on TWSDs led to introducing changes of the shape of the discharge vessels aiming at reaching large area discharge production [166,167] as well as to inventing new types of launchers for planar discharges [168][169][170][171][172][173][174][175][176][177][178][179][180][181][182][183] and short tubular discharges [184][185][186][187][188][189][190][191][192] and also new launchers for discharge production in the microwave range [193]. Many possibilities for the use of TWSDs for surface processing and film deposition [12,149,[194][195][196][197][198][199][200][201][202][203][204][205][206][207][208][209]…”

Modelling and Characteristics of Large-Area RF Plasmas Produced by Surface Wave

“…Thus, Q is independent of z under a fixed gas pressure, as long as the possible z-dependence of the temperature is ignored. (8) shows that the plasma density N* is definitely determined as a function of Z*, provided that the density N*0 is given. The density profile is characterized by a simple function H(N*).…”

Excitation of electromagnetic surface waves by an annular electron beam in a plasma waveguide with a dielectric rod and a magnetized plasma column

“…Solving equation (11) in different regions, applying the boundary conditions and using the definitions (13), one can obtain the dispersion equations…”

“…For example, the electromagnetic surface waves on a semi-bounded magnetized plasma are non-reciprocal and can be excited by an electron beam flowing on the plasma surface [3]. The application and generation of surface modes in plasma diagnostics has been actively investigated [11][12][13]. In cylindrical plasma devices such as cylindrical unmagnetized plasma waveguides and the strongly magnetized plasma waveguides these waves can be separated into two different modes [14,15].…”