Proposal for the Coma Aberration Dependent Overlay Error Compensation Technology

Abstract

Microfabrication techniques allow one to construct metallpolymer bilayers anchored at one end to a substrate end free to move at the other end. Electrically controlled 'fingers' were fabricated using the conducting polymer as an artificial muscle: doping and undoping the conjugated polymer causes a change in volume of this layer which results in bending of the bilayer. Grasping hands, fingers with sensing tips, and micropumps can be envisioned. Standing in the way of immediate fabrication are several materials challenges including layer adhesion, material compatibility, sacrificial layer improvement, and iow-temperature processing techniques.