2008
DOI: 10.1007/s10909-007-9694-1
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Properties of Ultra-Thin NbN Films for Membrane-Type THz HEB

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Cited by 9 publications
(5 citation statements)
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“…However, the lattice mismatch between NbN and Si is more serious compared to that between MgO and Al 2 O 3 , and subsequently the superconducting characteristics of the NbN films on Si substrate [18,19] are more degraded, which directly reduces the device's performance. Substrate heating [1,18,19] and a variety of buffer layers such as MgO [15,20], Si 3 N 4 [20], 3C-SiC [21,22], AlN [23], TiN [24] on silicon substrates have been used to improve the quality of the NbN films. 3C-SiC buffered Si substrate allows for epitaxial growth of the NbN films, resulting in a monocrystalline structure and an approx.…”
Section: Introductionmentioning
confidence: 99%
“…However, the lattice mismatch between NbN and Si is more serious compared to that between MgO and Al 2 O 3 , and subsequently the superconducting characteristics of the NbN films on Si substrate [18,19] are more degraded, which directly reduces the device's performance. Substrate heating [1,18,19] and a variety of buffer layers such as MgO [15,20], Si 3 N 4 [20], 3C-SiC [21,22], AlN [23], TiN [24] on silicon substrates have been used to improve the quality of the NbN films. 3C-SiC buffered Si substrate allows for epitaxial growth of the NbN films, resulting in a monocrystalline structure and an approx.…”
Section: Introductionmentioning
confidence: 99%
“…Increased efficiency of terahertz detection is achieved by thermal isolation of HEBs by depositing NbN films on air bridges formed by thin membrane of Si 3 N 4 , 9 to improve the quality of these films alternative materials for buffer layer are being explored. 10 Recently there are attempts to transfer the SSPD fabricated on SiN x membranes to photonic structures on a secondary chip. 11 On-chip graphenebased photo-detectors are another area of research due to simpler CMOS-compatible fabrication techniques.…”
mentioning
confidence: 99%
“…Thus, a small temperature modulation creates a large resistance modulation, thereby leading to the excellent sensitivities of the superconducting HEB mixers. The transition temperature of a thin-lm superconductor depends on many parameters, including the transition temperature of the bulk superconductor, lm thickness, fabrication quality, and superconductor-substrate interface [77]. Some superconductors commonly used in HEB mixers are NbN [78][79][80][81], NbTiN [82][83][84] and Nb [85].…”
Section: Hot Electron Bolometer Mixersmentioning
confidence: 99%