Properties of plasmas generated in microdischarges

Munoz-Serrano, E.; Hagelaar, Gerjan; Callegari, Thierry; Boeuf, Jean-Pierre; Pitchford, L. C.

doi:10.1088/0741-3335/48/12b/s36

Cited by 30 publications

(24 citation statements)

References 7 publications

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“…The particle balance Eqs. ((15)- (18)) are used to obtain the evolution of the model variables (V, I d , T e , n e , n Ar þ , n Ar þ 2 , n Ar Ã ð 3 P 1 Þ , n Ar Ã ð 3 P 2 Þ . Figure 7 shows the evolution of the electron density as a function of time for a gas pressure of 150 Torr, as measured experimentally (dots) and as calculated by the model including excited states (solid line).…”

Section: Resultsmentioning

confidence: 99%

“…dn Ar Ã ð 3 P 2 Þ dt ¼ K e n g n e þ 5 12 K rec2 n e n Ar þ 2 þ 5 12 K rec1 n 2 e n Ar þ þ K 0 m1 n e n Ar Ã ð 3 P 1 Þ þ K 0 m2 n g n Ar Ã ð 3 P 1 Þ À K i n e n Ar Ã ð 3 P 2 Þ À K 3 n 2 g n Ar Ã ð 3 P 2 Þ À K m1 n e n Ar Ã ð 3 P 2 Þ À K m2 n g n Ar Ã ð 3 P 2 Þ : (18) Note that the electron balance equation now includes multistep ionization.…”

Section: -4mentioning

confidence: 99%

“…The MHCD configuration has recently been studied both by experiments [12][13][14][15] and by numerical simulations. [16][17][18][19][20][21] When the discharge current is large enough (typically above 1 mA in our device), the system presents a stable operating regime, named the normal regime, during which the discharge is struck in the hole but also expands on the cathode backside. Several groups have measured the electron density in the hole of the MHCD during this normal regime.…”

Section: Introductionmentioning

confidence: 99%

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A global model of the self-pulsing regime of micro-hollow cathode discharges

Lazzaroni

Chabert

2012

Journal of Applied Physics

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International audienceA global (volume-averaged) model of the self-pulsing regime of micro-hollow cathode discharges working in argon gas is proposed. The power balance is done using an equivalent circuit model of the discharge that allows the current and voltage dynamics to be calculated. The fraction of the total power dissipated in the discharge that contributes to electron heating is deduced from a sheath model previously described. The particle balance is first done in a very simplified reaction scheme involving only electrons, argon atomic ions, and argon molecular ions. In a second step, the excited states (the metastable state Ar*(3P2) and the resonant state Ar*(3P1)) are included in the particle balance equations. The models are compared to experiments and several conclusions are drawn. The model without excited states underestimates the electron density and does not capture well the trends in pressure. The model with the excited states is in better agreement which shows that multi-step ionization plays a significant role. The time-evolution of the electron density follows closely that of the discharge current but the excited states density presents two peaks: (i) the first at the early stage of the current peak due to direct excitation with high electron temperature, (ii) the second at the end of the current (and electron density) peak due to large production of excited states by electron-ion recombination at very low electron temperature

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Section: Resultsmentioning

confidence: 99%

Section: -4mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A global model of the self-pulsing regime of micro-hollow cathode discharges

Lazzaroni

Chabert

2012

Journal of Applied Physics

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“…Thus far, most studies on simulating microplasma are based on fluid models 3,[28][29][30][31] and use efficient computation. The collective plasma characteristics are predicted using fluid models.…”

Section: -2mentioning

confidence: 99%

Electron and ion kinetics in three-dimensional confined microwave-induced microplasmas at low gas pressures

Tang

Wang

et al. 2016

AIP Advances

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The effects of the gas pressure (pg), microcavity height (t), Au vapor addition, and microwave frequency on the properties of three-dimensional confined microwave-induced microplasmas were discussed in light of simulation results of a glow microdischarge in a three-dimensional microcavity (diameter dh = 1000 μm) driven at constant voltage loading on the drive electrode (Vrf) of 180 V. The simulation was performed using the PIC/MCC method, whose results were experimentally verified. In all the cases we investigated in this study, the microplasmas were in the γ-mode. When pg increased, the maximum electron (ne) or ion density (nAr+) distributions turned narrow and close to the discharge gap due to the decrease in the mean free path of the secondary electron emission (SEE) electrons (λSEE-e). The peak ne and nAr+ were not a monotonic function of pg, resulting from the two conflicting effects of pg on ne and nAr+. The impact of ions on the electrode was enhanced when pg increased. This was determined after comparing the results of ion energy distribution function (IEDFs) at various pg. The effects of t on the peaks and distributions of ne and nAr+ were negligible in the range of t from 1.0 to 3.0 mm. The minimum t of 0.6 mm for a steady glow discharge was predicted for pg of 800 Pa and Vrf of 180 V. The Au vapor addition increased the peaks of ne and nAr+, due to the lower ionization voltage of Au atom. The acceleration of ions in the sheaths was intensified with the addition of Au vapor because of the increased potential difference in the sheath at the drive electrode.

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“…13 In this letter we report efficient production of O 2 ͑a 1 ⌬ g ͒ in a different discharge configuration; i.e., in the microcathode sustained discharges ͑MCSDs͒, first developed by Schoenbach and co-workers. 20 These values are low enough to allow an efficient O 2 ͑a 1 ⌬ g ͒ production. In air at atmospheric pressure, electron density and gas temperature were measured 17 by a laser technique and found to be, respectively, about 10 13 cm −3 and 2000 K for a discharge current of 10 mA.…”

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confidence: 99%

Singlet oxygen production in a microcathode sustained discharge

Bauville

Lacour

Magne

et al. 2007

Applied Physics Letters

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The authors report experimental results showing that high yields of singlet oxygen O2(aΔg1) can be generated in a three-electrode microcathode sustained discharge (MCSD) configuration. This configuration consists of a microhollow cathode discharge (MHCD) acting as a plasma cathode to sustain a stable glow discharge between the MHCD and a third, planar electrode placed at a distance of 8mm. Experiments were performed in pure oxygen and in mixtures of oxygen with rare gases (He or Ar) at pressures up to 130Torr. O2(aΔg1) relative yields of 7.6% were measured 23cm downstream in the afterglow of the MCSD discharge.

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Properties of plasmas generated in microdischarges

Cited by 30 publications

References 7 publications

A global model of the self-pulsing regime of micro-hollow cathode discharges

A global model of the self-pulsing regime of micro-hollow cathode discharges

Electron and ion kinetics in three-dimensional confined microwave-induced microplasmas at low gas pressures

Singlet oxygen production in a microcathode sustained discharge

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