2016
DOI: 10.1002/pssb.201600708
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Properties of C‐doped GaN

Abstract: Carbon‐doping in the concentration range from [C] = 5 × 1017 to 1.2 × 1019 cm−3 is employed to achieve semi‐insulating properties of GaN layers as required for electronic power devices. Using propane as a carbon precursor, an independent analysis of the carbon incorporation during growth and its impact on electrical properties of the layers was obtained as growth parameters for optimum GaN quality could be applied. We observe that C is within precision of measurements fully incorporated in GaN as compensating … Show more

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Cited by 37 publications
(26 citation statements)
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“…Other details of these samples, including growth conditions and the results of initial characterization can be found in Ref. 23 -3 , even though the concentration of free electrons is lower than 10 18 cm -3 in some of these samples. Fig.…”
Section: A Samplesmentioning
confidence: 99%
“…Other details of these samples, including growth conditions and the results of initial characterization can be found in Ref. 23 -3 , even though the concentration of free electrons is lower than 10 18 cm -3 in some of these samples. Fig.…”
Section: A Samplesmentioning
confidence: 99%
“…of knocking-in the surface contaminants into material volume during sputtering with a primary ion beam. In MOCVD-grown GaN samples, these "tails" of impurity concentrations from the surface to bulk are typically short (less than 50 nm) 7,13,14 . However, in HVPE-grown GaN, the tails of Si, O, C, and H are typically longer (200-500 nm) 8,10 .…”
mentioning
confidence: 99%
“…The intensity of C 1s is found to increase as we increase the sensitivity of the measurement towards GaN surface while O 1s signal shows marginal changes with increased surface sensitivity. This suggests an increase in the compensation of free electrons with the increase of carbon concentration at the top GaN surface, depicting the semi‐insulating nature or HR‐GaN surface …”
Section: Resultsmentioning
confidence: 96%
“…The intentional/unintentional doping of suitable species can cause compensation of free electrons in the inherently negatively charged defects rich GaN to form semi‐insulating or highly resistive GaN (HR‐GaN). This may lead to a reduction in the leakage current by several orders due to the shift in the Fermi level toward midgap position, thereby, facilitating a prompt lateral current transportation …”
Section: Introductionmentioning
confidence: 99%