2022
DOI: 10.1063/5.0092356
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Properties and device performance of BN thin films grown on GaN by pulsed laser deposition

Abstract: Wide and ultrawide-bandgap semiconductors lie at the heart of next-generation high-power, high-frequency electronics. Here, we report the growth of ultrawide-bandgap boron nitride (BN) thin films on wide-bandgap gallium nitride (GaN) by pulsed laser deposition. Comprehensive spectroscopic (core level and valence band x-ray photoelectron spectroscopy, Fourier-transform infrared spectroscopy, and Raman) and microscopic (atomic force microscopy and scanning transmission electron microscopy) characterizations conf… Show more

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Cited by 9 publications
(5 citation statements)
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“…[48,49] Comparatively, the SHG signal for nanocrystalline h-BN on 4H-SiC is found to be significantly higher (≈25 times) than the film on these substrates (with an effective 𝜒 (2) of ≈0.10 pm V −1 ). [48] We measured the cross-plane thermal conductivity k ⊥ of the film using the optical pump-probe method of frequencydomain thermoreflectance (FDTR) (see Experimental Section). An electro-optic modulator (EOM) induced a sinusoidal intensity modulation on the pump, 488 nm continuous wave laser (from a signal generated by the lock-in amplifier), creating a periodic heat flux on the sample surface.…”
Section: Resultsmentioning
confidence: 85%
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“…[48,49] Comparatively, the SHG signal for nanocrystalline h-BN on 4H-SiC is found to be significantly higher (≈25 times) than the film on these substrates (with an effective 𝜒 (2) of ≈0.10 pm V −1 ). [48] We measured the cross-plane thermal conductivity k ⊥ of the film using the optical pump-probe method of frequencydomain thermoreflectance (FDTR) (see Experimental Section). An electro-optic modulator (EOM) induced a sinusoidal intensity modulation on the pump, 488 nm continuous wave laser (from a signal generated by the lock-in amplifier), creating a periodic heat flux on the sample surface.…”
Section: Resultsmentioning
confidence: 85%
“…We also measured the SHG for h‐BN films grown on sapphire and GaN substrates (Figure S7, Supporting Information), on which films are either single‐crystalline (on sapphire) or fully disordered (on GaN). [ 48,49 ] Comparatively, the SHG signal for nanocrystalline h‐BN on 4H‐SiC is found to be significantly higher (≈25 times) than the film on these substrates (with an effective χ (2) of ≈0.10 pm V −1 ). [ 48 ]…”
Section: Resultsmentioning
confidence: 99%
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“…Previous studies have reported that the damage threshold in graphene and h-BN under ion irradiation is dependent on their number of layers. ,, The structural damage in h-BN can lead to the longitudinal optical (LO) phonon mode (E 1u ) at 1609 cm –1 becoming Raman-active by symmetry breaking, which can be used to characterize the degree of damage of h-BN . To further reveal the relationship between the production of quantum emitters and the defects/layers of h-BN flakes, Raman mappings of the E 1u peak intensity (the integral intensity between 1570 and 1650 cm –1 ) were acquired from the corresponding h-BN flakes.…”
Section: Resultsmentioning
confidence: 99%
“…Recently, Baskaran et al [127] investigated an AlN/β-Ga 2 O 3 high-electron-mobility transistor (HEMT) on a SiC substrate for power converters and RF applications. Similar to AlN, BN is emerging as a UWBG material with a bandgap of ~6.0 eV and a critical field of ~10 MV/cm [128][129][130]. However, BN predominantly functions as a dielectric material rather than a semiconductor.…”
Section: β-Ga 2 O 3 Heterostructures With Other Uwbg Semiconductorsmentioning
confidence: 99%