2019
DOI: 10.3390/app9102012
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Progress in Phase Calibration for Liquid Crystal Spatial Light Modulators

Abstract: Phase-only Spatial Light Modulator (SLM) is one of the most widely used devices for phase modulation. It has been successfully applied in the field with requirements of precision phase modulation such as holographic display, optical tweezers, lithography, etc. However, due to the limitations in the manufacturing process, the grayscale-phase response could be different for every single SLM device, even varying on sections of an SLM panel. A diverse array of calibration methods have been proposed and could be so… Show more

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Cited by 57 publications
(21 citation statements)
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References 44 publications
(64 reference statements)
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“…A good complement to the previous paper is given by Li and Cao [8]. The authors focus their review on the available characterization techniques to obtain the grayscale-phase response of LCoS devices.…”
Section: Special Issue Papersmentioning
confidence: 98%
“…A good complement to the previous paper is given by Li and Cao [8]. The authors focus their review on the available characterization techniques to obtain the grayscale-phase response of LCoS devices.…”
Section: Special Issue Papersmentioning
confidence: 98%
“…Readers may refer to [41] for a detailed description of the system configuration. The phase response of the SLM was calibrated by a self-referenced interferometric method [77][78][79]. The phase modulation patterns were randomly generated and then Gaussian-filtered in order to introduce enough diversity while minimizing the crosstalk effect between adjacent SLM pixels.…”
Section: Optical Experimentsmentioning
confidence: 99%
“…To begin with, let us outline the working principle of a reflective phase-only SLM, which is currently the mainstream product widely used for the dynamic engineering of the wavefront. The structure of SLM is a sandwich layer filled with parallel nematic liquid crystals between a glass cover plate and a silicon backplane [22]. The cover plate is coated with a layer of transparent conducting film acting as the common electrode, while the silicon backplane has millions of individually addressable reflective electrode pixels.…”
Section: High-precision Calibration Of Phase-only Spatial Light Modulatorsmentioning
confidence: 99%