Progress and applications of cluster ion beam technology

Yamada, Isao; Matsuo, Jiro; Toyoda, Noriaki; Aoki, Takaaki; Seki, Toshio

doi:10.1016/j.cossms.2014.11.002

Cited by 53 publications

(8 citation statements)

References 31 publications

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“…5 Targeted applications of radiation have been used as nanoscale device processing tools for decades, most notably in the semiconductor industry. 6 In these contexts and many others, reliably characterizing radiation-induced effects on both the structure and properties of many classes of materials is a vital challenge.…”

Section: Introductionmentioning

confidence: 99%

Listening to Radiation Damage In Situ: Passive and Active Acoustic Techniques

Dennett

Choens

Taylor

et al. 2019

JOM

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Knowing when, why, and how materials evolve, degrade, or fail in radiation environments is pivotal to a wide range of fields from semiconductor processing to advanced nuclear reactor design. A variety of methods, including optical and electron microscopy, mechanical testing, and thermal techniques, have been used in the past to successfully monitor the microstructural and property evolution of materials exposed to extreme radiation environments. Acoustic techniques have also been used in the past for this purpose, although most methodologies have not achieved widespread adoption. However, with an increasing desire to understand microstructure and property evolution in situ, acoustic methods provide a promising pathway to uncover information not accessible to more traditional characterization techniques. This work highlights how two different classes of acoustic techniques may be used to monitor material evolution during in situ ion beam irradiation. The passive listening technique of acoustic emission is demonstrated on two model systems, quartz and palladium, and shown to be a useful tool in identifying the onset of damage events such as microcracking. An active acoustic technique in the form of transient grating spectroscopy is used to indirectly monitor the formation of small defect clusters in copper irradiated with self-ions at high temperature through the evolution of surface acoustic wave speeds. These studies together demonstrate the large potential for using acoustic techniques as in situ diagnostics. Such tools could be used to optimize ion beam processing techniques or identify modes and kinetics of materials degradation in extreme radiation environments.

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Section: Introductionmentioning

confidence: 99%

Listening to Radiation Damage In Situ: Passive and Active Acoustic Techniques

Dennett

Choens

Taylor

et al. 2019

JOM

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“…Обработка материалов слабосвязанными кластерными ионами, генерируемыми ионизацией нейтральных кластеров из сверхзвуковой газовой струи, является многообещающим инструментом для различных практических приложений: приповерхностной имплантации, осаждения тонких пленок, масс-спектрометрии вторичных ионов с помощью кластерных ионов [1]. В частности, нелинейные эффекты взаимодействия кластеров с обрабатываемой поверхностью обеспечивают эффективное сглаживание поверхности различных материалов (металлов, диэлектриков, монокристаллов и сверхтвердых материалов) до субнанометрового уровня шероховатости при минимальном повреждении подповерхностной структуры [2][3][4][5].…”

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Сглаживание тонких поликристаллических пленок AlN кластерными ионами аргона

Николаев¹,

Коробейщиков²,

Роенко³

et al. 2021

Письма В Журнал Технической Физики

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The possibility of surface modification of thin polycrystalline aluminum nitride films by bombardment with argon cluster ion beam is investigated. The processing was carried out with high- (105 eV/atom) and low-energy (10 eV/atom) cluster ions. Using the spectral function of roughness, a highly efficient smoothing of the surface of nanostructured thin films of aluminum nitride was demonstrated in a wide range of spatial frequencies (ν = 0.02–128 μm-1) and at small etching depth (<100 nm).

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“…Одним из перспективных инструментов модификации поверхности являются пучки газовых кластерных ионов. Показано, что благодаря нелинейным эффектам коллективного взаимодействия падающих кластеров с твердым телом и возможности независимо регулировать их размеры и кинетическую энергию можно сглаживать поверхности различных материалов с минимальным повреждением структуры обрабатываемого материала [4][5][6].…”

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Финишная Обработка Поверхности Монокристаллов Титанил-Фосфата Калия Кластерными Ионами Аргона

Коробейщиков¹,

Николаев²,

Роенко³

2019

Письма В Журнал Технической Физики

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It is demonstrated that a argon cluster ion beam can be used for the finishing treatment of ultrasmooth surfaces (with initial root-mean-square roughness below 0.3 nm) of potassium titanyl phosphate single crystals. Analysis of the power spectral density function of surface roughness showed that cluster-ion irradiation leads to removal of residual chemical contaminations from the subsurface layer and produces additional smoothing of the crystal surface in a broad range of spatial frequencies (ν = 0.2–100 μm^–1).

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Progress and applications of cluster ion beam technology

Cited by 53 publications

References 31 publications

Listening to Radiation Damage In Situ: Passive and Active Acoustic Techniques

Listening to Radiation Damage In Situ: Passive and Active Acoustic Techniques

Сглаживание тонких поликристаллических пленок AlN кластерными ионами аргона

Финишная Обработка Поверхности Монокристаллов Титанил-Фосфата Калия Кластерными Ионами Аргона

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