Programmable Bidirectional Folding of Metallic Thin Films for 3D Chiral Optical Antennas

Mao, Yifei; Zheng, Yun; Li, Can; Guo, L. Jay; Pan, Yini; Zhu, Rui; Xu, Jun; Zhang, Weihua; Wu, Wengang

doi:10.1002/adma.201606482

Cited by 41 publications

(25 citation statements)

References 32 publications

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“…Although structurally successful, they generally lack electronic, optical, and magnetic functionalities, and are typically larger than 100 µm in size. In contrast, inorganic materials have desired functionalities, yet they are mechanically “hard” and their deformations require either processing at an elevated temperature or via high‐energy ion‐beam bombardment …”

mentioning

confidence: 99%

3D Nanofabrication via Chemo‐Mechanical Transformation of Nanocrystal/Bulk Heterostructures

et al. 2018

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Planar nanocrystal/bulk heterostructures are transformed into 3D architectures by taking advantage of the different chemical and mechanical properties of nanocrystal and bulk thin films. Nanocrystal/bulk heterostructures are fabricated via bottom-up assembly and top-down fabrication. The nanocrystals are capped by long ligands introduced in their synthesis, and therefore their surfaces are chemically addressable, and their assemblies are mechanically "soft," in contrast to the bulk films. Chemical modification of the nanocrystal surface, exchanging the long ligands for more compact chemistries, triggers large volume shrinkage of the nanocrystal layer and drives bending of the nanocrystal/bulk heterostructures. Exploiting the differential chemo-mechanical properties of nanocrystal and bulk materials, the scalable fabrication of designed 3D, cell-sized nanocrystal/bulk superstructures is demonstrated, which possess unique functions derived from nanocrystal building blocks.

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confidence: 99%

3D Nanofabrication via Chemo‐Mechanical Transformation of Nanocrystal/Bulk Heterostructures

et al. 2018

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“…Apart from the conventional functions in fabrication, FIB has also been developed to conduct some other fabrication techniques with its unique advantages in recent years, among which the FIB stress-induced deformation (FIB-SID) effect is one of latest developing techniques applied in micro/nanofabrication. The most attractive aspect of this FIB-SID technique is the capability of bending suspended thin films of various materials in both directions (−70-90 • ) precisely by controlling the ion dose and irradiation area of FIB and, the deformation might be caused by the stress change in the films under FIB irradiation [28]. The FIB-SID technique is a newly developed method to fabricate complex 3D micro/nanostructures [29][30][31][32][33], which can be used in optical modulation, controllable drug delivery, cell capsulation, and many other areas [34].…”

Section: Limitation Of Suspended Film Basedmentioning

confidence: 99%

A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect

et al. 2020

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Due to their unique electromagnetic properties, meta-atom arrays have always been a hotspot to realize all kinds of particular functions, and the research on meta-atom structure has extended from two-dimensions (2D) to three-dimensions (3D) in recent years. With the continuous pursuit of complex 3D meta-atom arrays, the increasing demand for more efficient and more precise nanofabrication methods has encountered challenges. To explore better fabrication methods, we presented a programmable nanofabrication method for a complex 3D meta-atom array based on focused-ion-beam stress-induced deformation (FIB-SID) effect and designed a distinctive nanostructure array composed of periodic 3D meta-atoms to demonstrate the presented method. After successful fabrication of the designed 3D meta-atom arrays, measurements were conducted to investigate the electric/magnetic field properties and infrared spectral characteristics using scanning cathodoluminescence (CL) microscopic imaging and Fourier transform infrared (FTIR) spectroscopy, which revealed a certain excitation mode induced by polarized incident IR light near 8 μm. Besides the programmability for complex 3D meta-atoms and wide applicability of materials, a more significant advantage of the method is that a large-scale array composed of complex 3D meta-atoms can be processed in a quasi-parallel way, which improves the processing efficiency and the consistency of unit cells dramatically.

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“…There have also been notable efforts to use self‐folding to fold 3D antennas at the micrometer scale. In studies by Mao et al, ion‐induced stresses were used to create repeated fold lines in 3 μm wide strips of aluminum to approximate one of the most common antenna designs, a helical antenna of less than 2 μm in diameter. In addition, self‐folding polymer sheets can also induce films of copper conductors to fold out of plane.…”

Section: Applicationsmentioning

confidence: 99%

Self‐Folding Metal Origami

Lazarus

Smith

Dickey

2019

Advanced Intelligent Systems

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Origami‐based techniques for creating 3D shapes from 2D patterns via folding have moved from the domain of art to practical engineering. Flat sheets are an appealing starting material for the creation of 3D objects because of 1) the ability to efficiently store and ship stacks of sheets, 2) the compatibility of flat surfaces with a variety of patterning processes such as lithography, and 3) the ability to make sheets via high‐throughput manufacturing. Self‐folding is the ability of flat sheets of materials to respond to external stimuli (light, heat, magnetic fields, etc.) and rapidly change shape without human intervention. Herein, the self‐folding of metals is reviewed, which is particularly important for opening up new applications in robotics, medicine, and reconfigurable electronics. These applications rely on the superior thermal, mechanical, and electrical properties of metals compared with polymer alternatives. The field is reviewed from actuation mechanisms and materials to design approaches and common applications of technologies.

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Programmable Bidirectional Folding of Metallic Thin Films for 3D Chiral Optical Antennas

Cited by 41 publications

References 32 publications

3D Nanofabrication via Chemo‐Mechanical Transformation of Nanocrystal/Bulk Heterostructures

3D Nanofabrication via Chemo‐Mechanical Transformation of Nanocrystal/Bulk Heterostructures

A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect

Self‐Folding Metal Origami

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