Profile measurement of a moving object using an improved projection grating phase-shifting profilometry

Hu, Eryi; He, Yuming; Hua, Yu

doi:10.1016/j.optcom.2009.04.037

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Cited by 11 publications

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“…Phase measurement profilometry [12][13][14][15] is a technique with high accuracy in fringe projection profilommetry method. By shifting the fringes, the phase containing the information of object's height can be calculated.…”

Section: Introductionmentioning

confidence: 99%

Phase shift reflectometry for wafer inspection

Kuang

Cao

et al. 2015

SPIE Proceedings

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In 3D measurement, specular surfaces can be reconstructed by phase shift reflectometry and the system configuration is simple. In this paper, a wafer is measured for industrial inspection to make sure the quality of the wafer by calibrating, phase unwrapping, slope calculation and integration. The profile result of the whole wafer can be reconstructed and it is a curve. As the height of the structures on the wafer is the target we are interested in, by fitting and subtracting the curve surface, the structures on the wafer can be observed on the flat surface. To confirm the quality farther, a part of the wafer is captured and zoomed in to be detected so that the difference between two structures can be observed better.

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Section: Introductionmentioning

confidence: 99%