Production quality characterisation techniques of sensors and prototypes for the BELLE II Pixel Detector

Abstract

The Belle II detector is a system currently under upgrade at the B-factory SuperKEKB in Tsukuba, Japan. The main novelty is the introduction of an additional position sensitive subdetector in the vertex detector, between the beam pipe and the strip detector system. The sensor of choice for the Belle II Pixel Detector is the Depleted p-channel Field Effect Transistor (DEPFET) sensor. In this paper the latest production of sensors and prototypes performed at the semiconductor Laboratory of the Max Planck Society, i.e. the PXD9 and the Electrical Multi-Chip Module (EMCM), are described. Wafer-level characterisation methods and techniques for faults in the metal system are also reported.