L-shell X-ray spectra of Mo surface induced by Xe 25+ and Xe 29+ were measured. The X-ray intensity was obtained in the kinetic energy range of the incident ions from 350 to 600 keV. The relationship of X-ray intensity with kinetic energy of the projectile and its charge state were studied, and the simple explanation was given.X-ray, surface, kinetic energy and charge state effect, Xe q+