Production and characterization of zinc oxide thin films for room temperature ozone sensing

Bender, Marcus; Gagaoudakis, E.; Douloufakis, E; Natsakou, E; Katsarakis, N.; Cimalla, V.; Kiriakidis, G.; Fortunato, Elvira; Nunes, Patrı́cia; Marques, A.; Martins, Rodrigo

doi:10.1016/s0040-6090(02)00588-6

Cited by 85 publications

(57 citation statements)

References 21 publications

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“…For example, in silicon, the mobility in a monocrystalline layer is about 1000 cm 2 /(V s), whereas in a polycrystalline one it is only at the level of 1 cm 2 /(V s). Therefore, polycrystalline ZnO layers may work in transistors [2][3][4][5] and sensors [6,7].…”

Section: Introductionmentioning

confidence: 99%

Characterization of ZnO Films Grown at Low Temperature

et al. 2008

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ZnO thin films were grown by atomic layer deposition method at extremely low temperature using a reactive diethylzinc as a zinc precursor. Optical properties, electrical properties and surface morphology were examined by photoluminescence, Hall effect and atomic force microscope. The study shows correlation between optical, electrical properties and surface morphology in a series of samples of different thickness.

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Section: Introductionmentioning

confidence: 99%

Characterization of ZnO Films Grown at Low Temperature

et al. 2008

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“…[7][8][9] Our work utilizes Atomic Layer Deposition of SnO 2 to tailor film thickness to twice the Debye length which has been shown to provide maximum sensitivity due to electron mobility modulation. [10][11][12] We correlate the derivative of the response to ozone concentration and utilize ultraviolet light to compensate for slow response and recovery times, respectively.…”

mentioning

confidence: 99%

“…[3][4][5][6] Several reports exist utilizing metal oxides at room temperature but they typically display response and recovery times greater than 10 minutes which also renders them unsuitable for real time monitoring. [7][8][9] Our work utilizes Atomic Layer Deposition of SnO 2 to tailor film thickness to twice the Debye length which has been shown to provide maximum sensitivity due to electron mobility modulation. [10][11][12] We correlate the derivative of the response to ozone concentration and utilize ultraviolet light to compensate for slow response and recovery times, respectively.…”

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confidence: 99%

Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing

Mills¹,

Lim²,

Lee³

et al. 2015

ECS J. Solid State Sci. Technol.

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This work demonstrates ultra-low power ozone sensors for real time, continuous, and portable monitoring. Atomic Layer Deposition (ALD) of SnO 2 enables precise control of ultrathin film thickness on the order of the Debye length to enhance sensitivity at room temperature. Correlation between ozone concentration and the rate of resistance change is used to maintain fast response times and ultraviolet (UV) illumination hastens recovery. ALD SnO 2 ultrathin film sensors realize room temperature operation with highly selective detection of 50 ppb ozone with average power consumption of 150 μW making them well suited for real time, portable environmental monitoring systems. High levels of ozone (O 3 ) have been shown to contribute to respiratory symptoms such as chronic cough, wheeze, and shortness of breath and chest colds with phlegm.1 Individuals suffering with respiratory diseases such as asthma are particularly sensitive to O 3 which can trigger an asthma attack hours after exposure.2 According to the Environmental Protection Agency, O 3 concentrations are higher near urban areas, highways and in general outside on hot sunny days highlighting the need for continuous, portable, real time monitoring of an individual's exposure levels in order to correlate personal health with surrounding environments. Sensors used for these applications must have high sensitivity, appropriate selectivity against other gases, low total power consumption, stability, accuracy, reliability and low cost. Among several sensing materials, SnO 2 has been shown to be sensitive toward gases in a variety of papers however metal oxide sensors typically require high operating temperatures to achieve good sensitivity and fast recovery resulting in mW of power consumption making them unsuitable for portable monitoring.3-6 Several reports exist utilizing metal oxides at room temperature but they typically display response and recovery times greater than 10 minutes which also renders them unsuitable for real time monitoring. [7][8][9] Our work utilizes Atomic Layer Deposition of SnO 2 to tailor film thickness to twice the Debye length which has been shown to provide maximum sensitivity due to electron mobility modulation. [10][11][12] We correlate the derivative of the response to ozone concentration and utilize ultraviolet light to compensate for slow response and recovery times, respectively. These methods enable detection of 10s of ppb of ozone with room temperature operation for average power consumption of just 150 μW. Additionally, our sensors demonstrate selectivity over interfering gases NO 2 and CO at typical atmospheric levels making them good candidates for continuous, portable monitoring. ExperimentalThe fabrication of sensor device started with 500nm thermal oxidation of Si (100) substrate for electrical isolation. After oxidation, the SnO 2 sensing material was deposited in an ALD system (Cambridge Nanotech Savannah 100 model). Tetrakis(dimethylamino)tin precursor and O 3 reactants were used to deposit SnO 2 at 200• C. The films were...

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“…ZnO-based films have recently been studied in many fields. For example, they can be used as transparent conductors [2][3][4], piezoelectric devices [5], gas sensors [6], solar cell windows [7] and surface acoustic wave devices [8].…”

Section: Introductionmentioning

confidence: 99%

Al-doped and pure ZnO thin films elaborated by sol-gel spin coating process for optoelectronic applications

Maache

Devers

Chala

2017

Физика И Техника Полупроводников

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Pure and aluminum-doped zinc oxide thin films were grown by spin coating at room temperature. As a starting material, zinc acetate was used. The dopant source was aluminum nitrate; the dopant molar ratio was varied between 1 and 10%. Structural analysis reveals that all films consist of single hexagonal wurtzite phase ZnO, and a preferential orientation along c-axis. They have a homogeneous surface. The measurements show that the films are nanostructured. The transmittance is greater than 75% in the visible region. The band gap energy decreases with the addition of dopant (Al) in prepared thin films and the resistivity decreases significantly.

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Production and characterization of zinc oxide thin films for room temperature ozone sensing

Cited by 85 publications

References 21 publications

Characterization of ZnO Films Grown at Low Temperature

Characterization of ZnO Films Grown at Low Temperature

Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing

Al-doped and pure ZnO thin films elaborated by sol-gel spin coating process for optoelectronic applications

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Production and characterization of zinc oxide thin films for room temperature ozone sensing

Cited by 85 publications

References 21 publications

Characterization of ZnO Films Grown at Low Temperature

Characterization of ZnO Films Grown at Low Temperature

Atomic Layer Deposition of SnO2for Selective Room Temperature Low ppb Level O3Sensing

Al-doped and pure ZnO thin films elaborated by sol-gel spin coating process for optoelectronic applications

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Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing