Processing and optical properties of inorganic-organic hybrids (polycerams). II. PDMS-based waveguides

Motakef, S.; Suratwala, Tayyab; Roncome, R.L.; Boulton, J. M.; Teowee, G.; Uhlmann, D. R.

doi:10.1016/0022-3093(94)90262-3

Cited by 35 publications

(12 citation statements)

References 7 publications

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“…[6][7][8][9][10][11][12][13] Organically modified ceramics called "ormosil" or "ceramer," which are prepared by a sol-gel method, are an example of such hybrid materials. They can show unique mechanical properties, such as low elastic moduli and high extensibilities combined with high mechanical strengths.…”

Section: Introductionmentioning

confidence: 99%

Bioactivity and mechanical properties of PDMS-modified CaO-SiO2-TiO2 hybrids prepared by sol-gel process

Chen

Miyata

Kokubo

et al. 2000

J. Biomed. Mater. Res.

100

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Hydrolysis and polycondensation of poly(dimethylsiloxane) (PDMS), tetraethoxysilane (TEOS), tetraisopropyltitanate (TiPT), and calcium nitrate gave essentially pore- and crack-free transparent monolithics of PDMS-modified CaO-SiO(2)-TiO(2) hybrids, when PDMS/(TEOS + TiPT) was larger than 26:74 in weight, under constant ratios of TEOS/TiPT of 9:1 in mol and Ca/(TEOS + TiPT) of 0.15 in mol. Their apatite-forming abilities in a simulated body fluid, which is indicative of bioactivity, increased with decreasing PDMS/(TEOS + TiPT). Their extensibility and Young's modulus decreased and increased, respectively, with decreasing PDMS/(TEOS + TiPT). The hybrids with PDMS/(TEOS + TiPT) of about 30:70 in weight showed fairly high apatite-forming ability, high extensibilities, and Young's moduli almost equal to those of the human cancellous bones. These new kind of bioactive materials with unique mechanical properties may be useful as bone-repairing materials.

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Section: Introductionmentioning

confidence: 99%

Bioactivity and mechanical properties of PDMS-modified CaO-SiO2-TiO2 hybrids prepared by sol-gel process

Chen

Miyata

Kokubo

et al. 2000

J. Biomed. Mater. Res.

100

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“…In addition, controlling the molecular environment of the dye (e.g., homogeneous dye distribution, dye caging, removal of impurities) can play a role in decreasing degradation. Previous investigations of silica: PDMS Polycerams as films for optical waveguides have shown superior optical transparency with low optical losses of <0.15 dB/cm and the materials are attractive hosts for laser dyes [8]. The objective of the present work was to synthesize transparent, crack-free monoliths of PM-567 Polycerams and to examine their photostability as function of host composition.…”

Section: Introductionmentioning

confidence: 98%

Processing and photostability of pyrromethene 567 polycerams

Suratwala

Gardlund

Davidson

et al. 1997

J Sol-Gel Sci Technol

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Abstract. Polyceram materials are attractive hosts for laser dyes because they can have high optical transparencies, high laser damage thresholds, and the ability to tailor optical properties by varying the composition and synthetic routes. Pyrromethene 567 has been successfully incorporated within silica: polydimethylsiloxane (PDMS) Polycerams to obtain polishable, crack-free, transparent monoliths using the sol-gel process. Fluorescence photostability was measured by pumping with a Q-switched, frequency doubled Nd : YAG laser (532 nm) at a pulse rate of 10 Hz. Fluorescence intensity dropped to 50% after approximately 50,000 pulses at a fluence of 0.10 J/cm 2. UV degradation studies were performed on Polycerams with different polymer contents, and the absorption photostability is related to the solubility and type of caging of the dye.

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“…Each of these materials is a suitable structural choice for optical components and has been previously used for different applications. SU-8 has already been applied to the fabrication of waveguides 7 , lenses 8 and gratings 9 , PDMS has been used to fabricate lenses integrated with microfluidic networks 10,11,12 and waveguides 13 and polyurethane has been used in optical waveguides 14 and as the matrix for non-linear optical components 15 .…”

Section: Introductionmentioning

confidence: 99%

A novel optical component for the development of an integrated interferometric system

et al. 2009

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Optical interferometry is a well established technique for high resolution displacement measurements. It is commonly used in the semiconductor industry as a sub-system of manufacturing and metrology tools. As the industry progresses, the tools continue to evolve, requiring the concomitant reduction of size and cost in sensors. Existing interferometric systems are bulky and therefore difficult to incorporate in equipment. Efforts are ongoing to miniaturize these systems but with optical components (beam splitters, detectors and lasers) still in the millimeter range, it is difficult to realize ultra compact systems. Thus, it is imperative to focus on development of micron scale components that would provide the necessary high spatial resolution in a compact format.The focus of this paper is on the development of a micron size optical component that combines multiple optical elements and can be integrated with VCSELs at the wafer level to yield a compact, low cost interferometric system. The design and development of this component containing the beam splitter and reference mirror will be presented including the investigation of suitable polymeric materials with desirable optical properties and appropriate fabrication techniques. Preliminary optical measurements of the integrated system will also be demonstrated. This approach has the potential to impact the next generation of micron scale interferometers as precise position/proximity sensors.Optical interferometry is a commericially available technique for precision positioning systems in a variety of applications within the micro-device manufacturing field. These systems provide high resolution alignment for both manufacturing 1 and metrology tools 2 . Researchers are investigating a number of interferometeric techniques, including fixed frequency and heterodyne, to address the continued need for more accurate measurements 3 . As semiconductor devices evolve, manufacturing and metrology systems increase in both cost and complexity to meet the challenges of the industry. To meet the needs of industry, tool manufactures must reduce cost while building sophisticated equipment, both of which can be achieved by reducing sub-system size and incorporating lower cost parts.A number of researchers have developed polymer optical components as an alternative to the commercially available products. These polymers are particularly advantageous because their mechanical and thermal properties can be controlled and components can be fabricated using simplified techniques producing less expensive but superior components 4 . Additionally, these components can be integrated with light sources and detectors into compact subsystems 5 . Researchers are investigating a number of techniques to fabricate high quality components, ranging from direct lithography 6 to replication molding 5 . This paper discusses the work on the fabrication of a novel optical component for an interferometric system. The optical component combines the beam splitter and reference mirror into a monolithi...

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Processing and optical properties of inorganic-organic hybrids (polycerams). II. PDMS-based waveguides

Cited by 35 publications

References 7 publications

Bioactivity and mechanical properties of PDMS-modified CaO-SiO2-TiO2 hybrids prepared by sol-gel process

Bioactivity and mechanical properties of PDMS-modified CaO-SiO2-TiO2 hybrids prepared by sol-gel process

Processing and photostability of pyrromethene 567 polycerams

A novel optical component for the development of an integrated interferometric system

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