2017
DOI: 10.1063/1.4974880
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Processing and charge state engineering of MoOx

Abstract: The effects of wet chemical processing employed in device fabrication standards are studied on molybdenum oxide (MoOx) ultra-thin films. We have combined x-ray photoelectron spectroscopy (XPS), angle resolved XPS and x-ray reflectivity to gain insight into the changes in composition, structure and electronic states upon treatment of films with different initial stoichiometry prepared by reactive sputtering. Our results show significant reduction effects associated with the development of gap states in MoOx, as… Show more

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Cited by 19 publications
(13 citation statements)
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References 57 publications
(57 reference statements)
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“…This discrepancy is attributed to that MoO 3 is unstable in the hydroxide (OH –1 )-rich buffer solution, which thus follows the reduction reaction pathway leading to lower oxidation states, as also verified in previous studies . Nevertheless, this XPS characterization clearly confirms that the BSB solution converts MoS 2 to MoO x , which is well known to be biofriendly. , All spectra have been referenced to a Au (4f 7/2 ) binding energy of 84.0 eV and compared with previous references and National Institute of Standards and Technology photoelectron database. Reaction details for the dissolution of 2D MoS 2 layers in the BSB and the PBS solutions are presented in the Supporting Information, Figure S2. Lastly, we have also demonstrated the progressive dissolution of 2D MoS 2 layers integrated on paper substrates and present the results in the Supporting Information, Figure S3.…”
Section: Resultssupporting
confidence: 57%
“…This discrepancy is attributed to that MoO 3 is unstable in the hydroxide (OH –1 )-rich buffer solution, which thus follows the reduction reaction pathway leading to lower oxidation states, as also verified in previous studies . Nevertheless, this XPS characterization clearly confirms that the BSB solution converts MoS 2 to MoO x , which is well known to be biofriendly. , All spectra have been referenced to a Au (4f 7/2 ) binding energy of 84.0 eV and compared with previous references and National Institute of Standards and Technology photoelectron database. Reaction details for the dissolution of 2D MoS 2 layers in the BSB and the PBS solutions are presented in the Supporting Information, Figure S2. Lastly, we have also demonstrated the progressive dissolution of 2D MoS 2 layers integrated on paper substrates and present the results in the Supporting Information, Figure S3.…”
Section: Resultssupporting
confidence: 57%
“…The electron band structures of the 2D flakes from the reduction of the extracted chloroplasts were investigated by the XPS valence spectrum analysis. From Figure d, for the initial 2D MoO 3 , the valence band edge was located at ∼3.1 eV compared to the Fermi level . After the 2D MoO 3 interaction with chloroplasts for 5 min, a weak peak at ∼1 V emerged, indicating the formation of the gap states contributed by the hydrogen dopants.…”
Section: Resultsmentioning
confidence: 92%
“…Электронная структура окисла молибдена хорошо изучена для образцов, полученных различными способами. Было обнаружено, что спектр валентной зоны, так же как и форма спектров остовных уровней молибдена зависят как от внешних условий, так и методов приготовления [13][14][15][16].…”
Section: Introductionunclassified