Abstract:Platinum (Pt)-incorporation (5 -10%) into nickel silicide films is a promising approach to reduce the contact resistance (RC) at the silicide/Si interface. One key issue during this silicide step is converting Ni-Pt silicide at different rapid thermal annealing (RTA) temperatures. The first RTA is performed to form Ni Silicide at a controllable thickness, followed by a Ni strip to remove access materials, lastly a second RTA is performed to drive Pt into the NiSi network at a higher temperature. This process r… Show more
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