To estimate the ion-irradiation effect on various types of SiCf/SiC composites, a silicon self-ion irradiation was performed at temperatures of 600 °C and 1200 °C and at doses of 5 dpa and 20 dpa, respectively. These SiCf/SiC composites were prepared by different processes such as CVI (chemical vapor infiltration), WA-CVI (SiC whisker assisted CVI) and hot-pressing (HP) method. Hardness was measured by a nano-indentation tester and microstructural changes were observed by TEM with SAD(selected area diffraction) technique for the specimens prepared by FIB (Focused Ion Beam) milling. The damage dose was calculated by the SRIM2003 code and then compared with microstructureal observation.