Procedure to characterize microroughness of optical thin films: application to ion-beam-sputtered vacuum-ultraviolet coatings

Ferré‐Borrull, Josep; Duparré, Angela; Quesnel, Etienne

doi:10.1364/ao.40.002190

Cited by 63 publications

(34 citation statements)

References 24 publications

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“…The function for describing the PSD of the pure film (i.e., only the film neglecting the substrate) can be conveniently made use of the k-correlation model (also called as ABC model), which is given by [21,28],…”

Section: Psd Models For Fractals and Superstructuresmentioning

confidence: 99%

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RETRACTED: Fractals and superstructures in gadolinia thin film morphology: Influence of process variables on their characteristic parameters

2006

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Section: Psd Models For Fractals and Superstructuresmentioning

confidence: 99%

“…For example here, s sh corresponds to the size and r sh to the height of the superstructures. In order to describe the PSD over a large spatial frequency bandwidth, Ferre-Borrull et al [21] have used a model that includes Eqs. (4), (6), (8).…”

Section: Psd Models For Fractals and Superstructuresmentioning

confidence: 99%

RETRACTED: Fractals and superstructures in gadolinia thin film morphology: Influence of process variables on their characteristic parameters

2006

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“…PSD analysis evaluates surface roughness as the spread of height deviations from a mean plane, and the lateral distribution/distance over which the height variation occurs. The PSD function applied here is given as [31]:…”

Section: Glass Surface Morphologymentioning

confidence: 99%

Quantitative morphological and compositional evaluation of laboratory prepared aluminoborosilicate glass surfaces

Gong¹,

Wren²,

Mellott³

2015

Applied Surface Science

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a b s t r a c tSurface finishing techniques including polishing, etching and heat treatment can modify the topography and the surface chemical composition of glasses. It is widely acknowledged that atomic force microscopy (AFM) can be used to quantify the morphology of surfaces, providing various parameters including average, peak-to-valley, and apparent root-mean-square roughness. Furthermore advanced power spectral density (PSD) analysis of AFM-derived surface profiles offers quantification of the spatial homogeneity of roughness values along different wavelengths, resulting in parameters including equivalent RMS, Hurst exponent, and fractal dimension. Outermost surface (∼8 nm) chemical composition can be quantitatively measured by X-ray photoelectron spectroscopy. In this paper, we first developed a series of surface finishing methods for an aluminoborosilicate glass system by polishing, etching or heat treatment. The chemical composition and environment of prepared glass surfaces were quantified by XPS and topographical analysis was carried out by fractal and k-correlation model fitting of PSD profiles derived via AFM. The chemical environment of elements, as determined via XPS, present on the prepared surfaces are similar to those within the pristine bulk glass. The compositional evolution of polished and melt surfaces are discussed in context of corrosion phenomena associated with the grinding, polishing, and etching of surfaces and the thermal heat treatment utilized for processing, respectively. Good correlation between surface finishing methods, chemical composition and topographical parameters were observed. More importantly, extensive discussions on topographical parameters including equivalent RMS, Hurst exponent, and fractal dimension are presented as a function of processing method.

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“…In contrast, PSD data obtained from electropolished materials typically do not exhibit straight lines on a log/log plot but display two regions of strong curvature, as will be seen later. More generally, the PSD of a niobium surface prepared by various methods can be fruitfully decomposed into contributions from each of these types of models [22,26,[35][36][37]:…”

Section: B Shifted-gaussian Model [34]mentioning

confidence: 99%

Enhanced characterization of niobium surface topography

Chang

Tian

Reece

et al. 2011

Phys. Rev. ST Accel. Beams

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Surface topography characterization is a continuing issue for the superconducting radio frequency (SRF) particle accelerator community. Efforts are under way to both improve surface topography and its characterization and analysis using various techniques. In measurement of topography, power spectral density (PSD) is a promising method to quantify typical surface parameters and develop scale-specific interpretations. PSD can also be used to indicate how the process modifies topography at different scales. However, generating an accurate and meaningful topographic PSD of an SRF surface requires careful analysis and optimization. In this report, niobium surfaces with different process histories are sampled with atomic force microscopy and stylus profilometry and analyzed to trace topography evolution at different scales. An optimized PSD analysis protocol to serve SRF needs is presented.

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Procedure to characterize microroughness of optical thin films: application to ion-beam-sputtered vacuum-ultraviolet coatings

Cited by 63 publications

References 24 publications

RETRACTED: Fractals and superstructures in gadolinia thin film morphology: Influence of process variables on their characteristic parameters

RETRACTED: Fractals and superstructures in gadolinia thin film morphology: Influence of process variables on their characteristic parameters

Quantitative morphological and compositional evaluation of laboratory prepared aluminoborosilicate glass surfaces

Enhanced characterization of niobium surface topography

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