Probing the elastic properties of individual nanostructures by combining in situ atomic force microscopy and micro-x-ray diffraction

Abstract

Atomic force microscopy ͑AFM͒ and micro-x-ray diffraction are combined to investigate nanostructures during in situ indentation. This technique allows the determination of elastic properties of individual nanoscale objects, particularly here SiGe/ Si͑001͒ self-assembled islands. Using this novel technique it was possible to select a specific island, align it in the microfocused beam, and apply a pressure onto it, using the AFM tip. Simultaneously, the x-ray diffuse scattering map from the island and the surrounding substrate was recorded in order to probe the lattice parameter change during indentation. An elastic reduction of the island lattice parameter of up to 0.6% was achieved.

X-ray nanodiffraction at individual SiGe/Si(001) dot molecules and its numerical description based on kinematical scattering theory

“…The spot size defines the excited region at the sample, whereas the high angular resolution provides detailed information about the lattice parameters and positional correlations within the structures at the illuminated area. Thus, scanning x-ray nanodiffraction enables the investigation of individual nanoscaled objects like quantum dots [8][9][10] or quantum wires 11 and provides spatially resolved strain distribution and chemical composition.…”

Installation of a combined Raman and AFM microscope as a sample environment for nuclear resonance scattering at P01, PETRA III

“…The MFM is also suited to investigate the influence of the synchrotron beam on the magnetic properties of the sample. With future spot sizes of the synchrotron beam, possibly in the range of some 100 nm, even manipulations of single iron containing objects on the nanometer scale can be performed via the AFM, as has already been shown by combined X-Ray diffraction and AFM experiments in [5].…”

In situ coupling of atomic force microscopy and sub-micrometer focused X-ray techniques

“…To shed additional light on this controversy and to improve the understanding of the mechanical behavior of low-dimensional materials, in situ techniques are desirable. Several instruments for in situ mechanical tests in scanning (SEM) and transmission electron microscopes (TEM) as well as in combination with microfocused X-ray diffraction (XRD) methods have been recently developed [4][5][6][7][8][9]. While SEM is a surface sensitive tool giving access only to defects which exit at the sample surface such as glide planes, in situ TEM studies allow for imaging the creation of defects and dislocations and their evolution during mechanical deformation.…”