2000
DOI: 10.1063/1.1318238
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Probing capped and uncapped mesoporous low-dielectric constant films using positron annihilation lifetime spectroscopy

Abstract: Synthesis of organically modified mesoporous silica as a low dielectric constant intermetal dielectric

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Cited by 54 publications
(42 citation statements)
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References 13 publications
(5 reference statements)
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“…[10][11][12][13][14] In the classical methods of porosity studies, like liquid nitrogen adsorption-desorption, the results are presented on the assumption of a pore structure as a bundle of capillaries, that is, having elongated form. In some approximation, such a capillary can be approximated by cylinders or cuboids.…”
mentioning
confidence: 99%
“…[10][11][12][13][14] In the classical methods of porosity studies, like liquid nitrogen adsorption-desorption, the results are presented on the assumption of a pore structure as a bundle of capillaries, that is, having elongated form. In some approximation, such a capillary can be approximated by cylinders or cuboids.…”
mentioning
confidence: 99%
“…Pores in porous media are usually irregular and complicated, and they may be interconnected [22,24] or isolated [23,24]. In this work, we choose cube as the pore shape for simplicity.…”
Section: Formulation Of Dielectric Constant Modelmentioning
confidence: 99%
“…By utilizing this broad range, PALS has emerged as a powerful tool for measuring the pore size in various materials [10][11][12][13][14]. Within the scope of free-volume theories, the o-Ps particle is bound inside a pore region.…”
Section: Ps As a Pore Probementioning
confidence: 99%