Probe measurements of magnetron discharge parameters

Karzin, V. V.; Smirnov, V. M.

doi:10.1088/1742-6596/729/1/012021

Cited by 3 publications

(1 citation statement)

References 6 publications

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“…There are two linear sections on the presented current-voltage curve: I cold and I hot , which occurrence can be explained by the presence of two groups of electrons with different temperatures in the magnetron discharge plasma. The presence of these two groups of electrons in the magnetron discharge with a metal conductive target was registered earlier in [14][15][16][17]. In the processing of the current-voltage curve of the probe, the beginning of the saturation current section of the electron branch was used to determine the plasma potential, then the above-mentioned procedure was used to determine temperatures of two electron groups, and then the plasma concentration was determined.…”

Section: Experimental Results and Discussion Thereofmentioning

confidence: 99%

In situ probe measurements of plasma parameters during the deposition of boron coatings by the magnetron method

et al. 2023

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The features of the probe technique are described and the results of measuring the parameters of plasma generated by a planar magnetron sputtering system with a pure boron target during coating deposition are presented. A feature of probe measurements was the use of heating the collecting surface of a single Langmuir probe. Heating led to a decrease in the electrical resistance of the boron film on the surface, which made it possible to carry out in situ probe measurements of the magnetron discharge plasma parameters during the entire process of boron coating. Keywords: plasma parameters, probe method, planar magnetron, boron films.

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Section: Experimental Results and Discussion Thereofmentioning

confidence: 99%