Electron Beam Testing Technology 1993
DOI: 10.1007/978-1-4899-1522-1_3
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Principles and Applications

Abstract: The purpose of this package is to enhance the user's knowledge and ability to make decisions regarding visual assessments of watershed condition, including both narrative and photographic documentation. This Information Paper (IP) provides the principles, a brief description of methods, their applications, quality assurance practices for reducing error or subjectivity, a brief description of the Standard Operating Procedures (SOPs), and a glossary of terms used in visual assessments and other forms of citizen … Show more

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Cited by 6 publications
(1 citation statement)
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“…Scanning electron microscopes (SEM) with low‐voltage columns, in which the landing energy at the sample is below 5 keV, have significant advantages across many applications, including microscopy, lithography, electron beam testing, and inspection (Yau et al ., '81; Reimer, '93; Thong, '93). In particular, low‐voltage microscopy excels at the formation of high‐resolution, high‐contrast images of surfaces in structures where the volumes of interest approach nanometer dimensions.…”
Section: Introductionmentioning
confidence: 99%
“…Scanning electron microscopes (SEM) with low‐voltage columns, in which the landing energy at the sample is below 5 keV, have significant advantages across many applications, including microscopy, lithography, electron beam testing, and inspection (Yau et al ., '81; Reimer, '93; Thong, '93). In particular, low‐voltage microscopy excels at the formation of high‐resolution, high‐contrast images of surfaces in structures where the volumes of interest approach nanometer dimensions.…”
Section: Introductionmentioning
confidence: 99%