Pressure sensors based on suspended graphene membranes

Smith, Anderson David; Vaziri, Sam; Niklaus, Frank; Fischer, Andreas; Sterner, Mikael; Delin, Anna; Östling, Mikael; Lemme, Max C.

doi:10.1016/j.sse.2013.04.019

Cited by 72 publications

(56 citation statements)

References 25 publications

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“…The remarkable electronic [1,2], thermal [3][4][5] and mechanical [6][7][8] properties of graphene have opened the door for many new electronic devices [9][10][11][12] and sensors [13][14][15][16][17][18][19][20]. Fabrication of these devices on wafer-scale often requires transfer of sheets of single-layer graphene grown by chemical vapor deposition, using a support polymer [21][22][23][24][25][26].…”

Section: Introductionmentioning

confidence: 99%

Mass measurement of graphene using quartz crystal microbalances

Dolleman

Hsu

Vollebregt

et al. 2019

Applied Physics Letters

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Current wafer-scale fabrication methods for graphene-based electronics and sensors involve the transfer of single-layer graphene by a support polymer. This often leaves some polymer residue on the graphene, which can strongly impact its electronic, thermal, and mechanical resonance properties. To assess the cleanliness of graphene fabrication methods, it is thus of considerable interest to quantify the amount of contamination on top of the graphene. Here, we present a methodology for direct measurement of the mass of the graphene sheet using quartz crystal microbalances (QCM). By monitoring the QCM resonance frequency during removal of graphene in an oxygen plasma, the total mass of the graphene and contamination is determined with sub-graphene-monolayer accuracy. Since the etch-rate of the contamination is higher than that of graphene, quantitative measurements of the mass of contaminants below, on top, and between graphene layers are obtained. We find that polymer-based dry transfer methods can increase the mass of a graphene sheet by a factor of 10. The presented mass measurement method is conceptually straightforward to interpret and can be used for standardized testing of graphene transfer procedures in order to improve the quality of graphene devices in future applications. arXiv:1902.11098v1 [cond-mat.mes-hall]

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Section: Introductionmentioning

confidence: 99%

Mass measurement of graphene using quartz crystal microbalances

Dolleman

Hsu

Vollebregt

et al. 2019

Applied Physics Letters

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“…The vias of the AFM tips are 15 µm in diameter, the AFM tip array has a pitch of 130 µm × 100 µm, and the monocrystalline silicon AFM cantilevers are 300 nm thick. Other variations of heterogeneous MEMS and IC integration with via formation during device transfer have been proposed 22,25 , including the integration of carbon-based NEMS materials [136][137][138] , material integration using self-assembly processes 139 , and transfer printing techniques for MEMS 140 .…”

Section: Mems Gyromentioning

confidence: 99%

Integrating MEMS and ICs

et al. 2015

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The majority of microelectromechanical system (MEMS) devices must be combined with integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers sense or control physical, optical or chemical quantities, ICs typically provide functionalities related to the signals of these transducers, such as analog-to-digital conversion, amplification, filtering and information processing as well as communication between the MEMS transducer and the outside world. Thus, the vast majority of commercial MEMS products, such as accelerometers, gyroscopes and micro-mirror arrays, are integrated and packaged together with ICs. There are a variety of possible methods of integrating and packaging MEMS and IC components, and the technology of choice strongly depends on the device, the field of application and the commercial requirements. In this review paper, traditional as well as innovative and emerging approaches to MEMS and IC integration are reviewed. These include approaches based on the hybrid integration of multiple chips (multi-chip solutions) as well as system-on-chip solutions based on wafer-level monolithic integration and heterogeneous integration techniques. These are important technological building blocks for the 'More-ThanMoore' paradigm described in the International Technology Roadmap for Semiconductors. In this paper, the various approaches are categorized in a coherent manner, their merits are discussed, and suitable application areas and implementations are critically investigated. The implications of the different MEMS and IC integration approaches for packaging, testing and final system costs are reviewed.

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“…The maximum gauge factor (Δ / ) in silicon was 200, while for SGS and semiconducting tubes it was 850 and 400, respectively. Similarly, a large number of graphene-based pressure sensors have been fabricated and investigated [12,[20][21][22][23][24][25][26][27][28][29][30].…”

Section: Introductionmentioning

confidence: 99%

Pressure Sensitive Sensors Based on Carbon Nanotubes, Graphene, and Its Composites

Ali

Khan

Каримов

et al. 2018

Journal of Nanomaterials

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Carbon nanotubes (CNTs) and graphene have attracted a great deal of interest due to their outstanding mechanical, optical, electrical, and structural properties. Most of the scientists and researchers have investigated the optical and electrical properties of these materials. However, due to unique electromechanical properties of these materials, it is required to explore the piezoresistive properties of bulk nanostructured CNTs, graphene, and CNT-graphene composites. We investigated and compared the sensitivities and piezoresistive properties of sandwich-type pure CNT, pure graphene, and CNT-graphene composite pressure sensors. For all the samples, increase in pressure from 0 to 0.183 kNm −2 results in a decrease in the impedance and direct current (DC) resistance. Sensitivity and percentage decrease in resistance and impedance of CNT-graphene composite were lower than pure CNT while being higher than pure graphene based sample. Moreover, under the same external applied pressure, the sensitivity and percentage decrease in impedance for pure CNT, pure graphene, and CNT-graphene composite were smaller than the corresponding sensitivity and percentage decrease in resistance. The achieved experimental results of the composite sample were compared with simulated results which exhibit reasonable agreement with each other. The deviations of simulated resistance-pressure and impedancepressure curves from experimental graphs were 0.029% and 0.105%, respectively.

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Pressure sensors based on suspended graphene membranes

Cited by 72 publications

References 25 publications

Mass measurement of graphene using quartz crystal microbalances

Mass measurement of graphene using quartz crystal microbalances

Integrating MEMS and ICs

Pressure Sensitive Sensors Based on Carbon Nanotubes, Graphene, and Its Composites

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