Pressure sensing element based on the BN–graphene–BN heterostructure

Li, Mengwei; Wu, Chenggen; Zhao, Shunsheng; Deng, Tao; Wang, Junqiang; Liu, Zewen; Wang, Li; Wang, Gao

doi:10.1063/1.5017079

Cited by 21 publications

(9 citation statements)

References 29 publications

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“…Under each pressure step, the averaged resistance and the corresponding standard deviation were extracted. As shown in Figure 6b, we obtain the nonlinear relationship of the graphene resistance and applied pressure similar to most literature reports [12,17]. Previously, this nonlinearity was attributed to the gas leakage.…”

Section: Improved Performance Of Pmma/graphene Pressure With Through-holesupporting

confidence: 86%

Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis

et al. 2020

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Graphene with atomic thickness possesses excellent mechanical and electrical properties, which hold great potential for high performance pressure sensing. The exposed electron of graphene is always cross-sensitive to any pollution absorbed or desorbed on the surface, from which the long-term stability of the graphene pressure sensor suffers a lot. This is one of the main obstacles towards graphene commercial applications. In this paper, we utilized polymethylmethacrylate (PMMA)/graphene heterostructure to isolate graphene from the ambient environment and enhance its strength simultaneously. PMMA/graphene pressure sensors, with the finite-depth cavity and the through-hole cavity separately, were made for comparative study. The through-hole device obtained a comparable sensitivity per unit area to the state of the art of the bare graphene pressure sensor, since there were no leaking cracks or defects. Both the sensitivity and stability of the through-hole sensor are better than those of the sensor with 285-nm-deep cavities, which is due to the sealed gas effect in the pressure cavity. A modified piezoresistive model was derived by considering the pressure change of the sealed gas in the pressure cavity. The calculated result of the new model is consistent with the experimental results. Our findings point out a promising route for performance optimization of graphene pressure sensors.

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Section: Improved Performance Of Pmma/graphene Pressure With Through-holesupporting

confidence: 86%

Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis

et al. 2020

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“…For tactile sensors used in E-skin, an abundance of facile synthetic methods for producing 2D graphene thin films exists. The CVD method is the most widely used approach to fabricate high-quality 2D graphene films, and many interesting works based on this method have been reported [ 59 , 60 ], Recently, Li et al [ 61 ] fabricated a tactile sensor based on a CVD graphene film-boron nitride (BN) heterostructure, wherein monolayer graphene was sandwiched between two layers of vertically stacked dielectric BN nanofilms. With the protection of the BN layers, the oxidation and contamination of graphene were effectively avoided.…”

Section: How To Improve the Performance Of Graphene-based Tactile Sensors?mentioning

confidence: 99%

Graphene Nanostructure-Based Tactile Sensors for Electronic Skin Applications

et al. 2019

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HIGHLIGHTS• Tremendous progress has been advanced by research into graphene and its derivatives with great benefits toward low-cost, portable, and real-time tactile sensors/electronic skin.• The review presented herein direct future efforts aimed at high-quality graphene-based tactile sensors and their implications for the wider scientific community.• The paper also are informative regarding some basic and crucial issues regarding graphene and its derivatives, such as charge-transport principles, doping/trapping behaviors, correlations between structure/morphology and properties/functions.ABSTRACT Skin is the largest organ of the human body and can perceive and respond to complex environmental stimulations. Recently, the development of electronic skin (E-skin) for the mimicry of the human sensory system has drawn great attention due to its potential applications in wearable human health monitoring and care systems, advanced robotics, artificial intelligence, and human-of graphene materials; (2) state-of-the-art protocols recently developed for high-performance tactile sensing, including representative examples; and (3) perspectives and current challenges for graphene-based tactile sensors in E-skin applications. A summary of these cutting-edge developments intends to provide readers with a deep understanding of the future design of high-quality tactile sensing devices and paves a path for their future commercial applications in the field of E-skin.

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“…or other impurities, causing n-/p-type doping in graphene [24,25]. As a result, graphene resistance sharply changes, sensor reliability shows large decreases, and serving life noticeably shortens [26]. Generally, materials with a strong affinity, such as polymer, h-BN, Al 2 O 3, and Si 3 N 4 , are used to protect the graphene sensing element and can improve the electrical properties and long-term stability of sensors [27][28][29][30][31][32].…”

Section: Introductionmentioning

confidence: 99%

A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors

Wang

Zhu

et al. 2022

Nanomaterials

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A graphene membrane acts as a highly sensitive element in a nano/micro–electro–mechanical system (N/MEMS) due to its unique physical and chemical properties. Here, a novel crossbeam structure with a graphene varistor protected by Si3N4 is presented for N/MEMS mechanical sensors. It substantially overcomes the poor reliability of previous sensors with suspended graphene and exhibits excellent mechanoelectrical coupling performance, as graphene is placed on the root of the crossbeam. By performing basic mechanical electrical measurements, a preferable gauge factor of ~1.35 is obtained. The sensitivity of the graphene pressure sensor based on the crossbeam structure chip is 33.13 mV/V/MPa in a wide range of 0~20 MPa. Other static specifications, including hysteresis error, nonlinear error, and repeatability error, are 2.0119%, 3.3622%, and 4.0271%, respectively. We conclude that a crossbeam structure with a graphene sensing element can be an application for the N/MEMS mechanical sensor.

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Pressure sensing element based on the BN–graphene–BN heterostructure

Cited by 21 publications

References 29 publications

Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis

Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis

Graphene Nanostructure-Based Tactile Sensors for Electronic Skin Applications

A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors

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