Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis

Liu, Ying; Zhang, Yong; Lin, Xin; Li, Kehong; Yang, Peng; Qiu, Jing; Liu, Guanjun

doi:10.3390/mi11090786

Cited by 7 publications

(5 citation statements)

References 30 publications

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“…prepared a pressure sensor with sensitivity of approximately 7.42 × 10 −5 kPa −1 . [ 229 ] The sensitivity of this device on the unit area is approximately the same order compared with suspended monolayer graphene. Due to the high specific surface area of 2D materials, the resistance of 2D materials is very sensitive to air and humidity.…”

Section: Static Pressure Sensorsmentioning

confidence: 96%

“…of Wagner et al; [ 230] d) From Ref. of Liu et al; [ 229] In the linear region characterized by small displacements, the displacement of the suspended film can be primarily attributed to the first term on the right-hand side of Equation (32). The thickness of the piezoresistive material is a critical parameter that significantly impacts the performance of the piezoresistive pressure sensors.…”

Section: Strain-based Pressure Sensorsmentioning

confidence: 99%

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A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

Wan,

Liu,

Zheng

et al. 2023

Adv Funct Materials

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Acoustic devices play an increasingly important role in modern society for information technology and intelligent systems, and recently significant progress has been made in the development of communication, sensing, and energy transduction applications. However, conventional material systems, such as polymers, metals and silicon, show limitations to fulfill the evolving requirements for high‐performance acoustic devices of small size, low power consumption, and multifunctional capabilities. 2D materials hold the promise in overcoming the development bottleneck of acoustic devices aforementioned, given their atomic‐thin thickness, extensive surface area, superior physical properties, and remarkable layer‐stacking tunability. By suspending the 2D materials, mechanical and thermal disruption from substrate will be eliminated, which will enable the development of new classes of acoustic devices with unprecedented sensitivity and accuracy. In this review, the recent progress of acoustic devices based on suspended 2D materials and their composites, especially applications in the audio frequency, static pressure, and ultrasonic frequency range, is briefly summarized, emphasizing the advantageous properties of suspended 2D materials and related outstanding device performance. Together with the development of 2D membrane synthesis, transfer, as well as microelectromechanical fabrication process, suspended 2D materials will shed light on the next‐generation high‐performance acoustic devices.

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Section: Static Pressure Sensorsmentioning

confidence: 96%

Section: Strain-based Pressure Sensorsmentioning

confidence: 99%

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

Wan,

Liu,

Zheng

et al. 2023

Adv Funct Materials

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“…To date, various elastic and conductive materials have been studied to fabricate high-performance sensors. For elastic matrices, polymers (e.g., PDMS, PMMA), , hydrogels (e.g., poly(vinyl alcohol)), and also fabrics − have been explored. For conductive materials, carbon nanomaterials (e.g., carbon black, carbon nanotubes, graphene), ,,, metallic nanomaterials (e.g., silver nanowires), and conductive polymers , have been extensively studied.…”

Section: Introductionmentioning

confidence: 99%

“…For elastic matrices, polymers (e.g., PDMS, PMMA), , hydrogels (e.g., poly(vinyl alcohol)), and also fabrics − have been explored. For conductive materials, carbon nanomaterials (e.g., carbon black, carbon nanotubes, graphene), ,,, metallic nanomaterials (e.g., silver nanowires), and conductive polymers , have been extensively studied. Compared with other common conductive materials, carbon nanomaterials are often mixed with elastic matrices (e.g., PDMS) in organic solutions (e.g., cyclohexane) thanks to the uniform dispersion in the organic solution phase.…”

Section: Introductionmentioning

confidence: 99%

Simultaneous Optimization of Sensitivity and Linearity for Flexible Pressure Sensor via Coupling Effect between Microstructures and Flat Substrate Component

Liu,

Ji,

Lei

et al. 2023

ACS Appl. Electron. Mater.

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Flexible piezoresistive pressure sensors with the advantages of a simple structure and facile signal acquisition have attracted considerable interest in various application fields. Although the piezoresistive layers have been widely explored to develop high-performance sensors, the trade-off between sensitivity and linearity has yet to be fully resolved. In this work, a CNT/ PDMS-based piezoresistive layer with the coupling effect of the microdomes and the flat substrate component is proposed to simultaneously optimize the sensitivity and linearity range of piezoresistive sensors. Different from conventional dome-based piezoresistive layers, the microdomes and substrate of the proposed layer can be codeformed to compensate for the resistance variation attenuation resulting from the stiffening effect of compressed soft materials. Upon the appropriate conductivity and elastic modulus of the piezoresistive layer, the sensitivity and linearity range of the sensor can be improved simultaneously. Moreover, the coupling effect of the microdomes and the substrate can be regulated by constructing gradient conductivity and elastic modulus, which enables further optimization of the sensing performance with a high sensitivity of 70.42 kPa −1 in an ultrawide linearity range of 0−950 kPa (R 2 = 0.99). The excellent sensing performance enables the sensor as a diverse wearable platform, which can not only precisely monitor various physiological signals (e.g., finger bending, walking, running, etc.) but also transmit Morse code information by simply switching the finger bending behaviors. We believe that the proposed sensor along with the optimization strategy can be of great potential for developing high-performance piezoresistive sensors for versatile wearable applications in the future.

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“…A great amount of effort has been exerted toward realizing the application of graphene in electronic devices, such as in flexible touch screens [ 11 ], high-frequency transistors [ 12 ], and high-sensitivity sensors [ 13 , 14 , 15 , 16 ]. Studies on graphene microelectromechanical system (MEMS) pressure sensors have attracted a certain degree of attention [ 17 , 18 , 19 , 20 , 21 , 22 ], as this would be advantageous for the miniaturization and batch production of sensors. Such sensors mainly focus on the structural study of suspended graphene and supporting graphene and are manufactured using traditional technology.…”

Section: Introductionmentioning

confidence: 99%

Improving the Sensing Properties of Graphene MEMS Pressure Sensor by Low-Temperature Annealing in Atmosphere

Liu

Wei

Wang

2022

Sensors

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The high demand for pressure devices with miniaturization and a wide bearing range has encouraged researchers to explore new high-performance sensors from different approaches. In this study, a sensitive element based on graphene in-plane compression properties for realizing pressure sensing is experimentally prepared using microelectromechanical systems (MEMS) fabrication technology; it consists of a 50 µm thick, 1400 µm wide square multilayer component membrane and a graphene monolayer with a meander pattern. The prepared sample is extensively characterized and analyzed by using various techniques, including atomic force microscopy, Raman spectroscopy, infrared spectroscopy, X-ray photoelectron spectroscopy, COMSOL finite element method, and density functional theory. The sensing performance of the new pressure sensor based on the sensitive element are obtained by theoretical analysis for electromechanical measurements of the sensitive element before and after low-temperature annealing in atmosphere. Results demonstrate that atmospheric annealing at 300 °C enhances the pressure sensing sensitivity by 4 times compared to pristine graphene without annealing, which benefits from the desorption of hydroxyl groups on the graphene surface during annealing. The sensitivity is comparable and even better than that of previous sensors based on graphene in-plane properties. Our results provide new insights into realizing high-performance MEMS devices based on 2D sensitive materials.

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Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis

Cited by 7 publications

References 30 publications

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

Simultaneous Optimization of Sensitivity and Linearity for Flexible Pressure Sensor via Coupling Effect between Microstructures and Flat Substrate Component

Improving the Sensing Properties of Graphene MEMS Pressure Sensor by Low-Temperature Annealing in Atmosphere

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