Pressure effect on YBa2Cu3O7 thin film growth in off-axis radio frequency magnetron sputtering

Abstract

Articles you may be interested inAtomic oxygen effect on the in situ growth of stoichiometric YBa2Cu3O7−δ epitaxial films by facing targets 90°o ffaxis radiofrequency magnetron sputtering YBa 2 Cu 3 O 7Ϫx ͑123͒ thin films were fabricated on ͑100͒ MgO substrates by off-axis single target radio frequency ͑rf͒ magnetron sputtering. Our study focused on the effect of chamber pressure on the composition, microstructure, and superconductive properties on transition behavior and T c of the grown film studied. An empirical formula was derived to explain the dependence of the deposition rate of various components on the pressure. Next, we compared the transport mechanism of the sputtered particles between the off-axis rf and the on-axis direct current sputtering and determined the processing conditions that result in superconducting films of better quality. According to our findings, growth at higher pressures ͑Ͼ100 mTorr͒ produces more homogeneous and higher T c superconducting films.

Surface texture and structure of ZnO films synthesized by off-axis sputtering deposition

“…16 The reason could be that, in YBa 2 Cu 3 O x film growth, Cu-rich particles and second phase particles are formed in films due to the strong bombardment and the complex distribution of the multicompound plume at low pressures. 4 and 6.…”

Resistance switching properties of sol–gel derived SrZrO3based memory thin films

“…Perovskite structured ceramics have been investigated for many applications such as gate dielectrics [1], dynamic random access memory (DRAM) [2], superconductor [3], ferroelectric memory [4] and tunable device [5]. Recently, perovskite ceramics have attracted much interest for their reversible resistance switching properties used for making resistive random access memory (RRAM) [6,7].…”