Present Situation and Developing Trend of Abrasive Air Jet Micromachining

Yan, Qiu Sheng; Zhang, Zi Qiang

doi:10.4028/www.scientific.net/kem.259-260.648

Cited by 5 publications

(7 citation statements)

References 13 publications

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“…However, the presented formulation allows its implementation for cases where particle second strike, mask wear and particle interference [20,21] effects are minimal. For example, use of a different particle size or pressure, or a different nozzle size would change significantly only the velocity distribution (5) and particle flux distribution (6). For masked channels, such changes would mostly affect the etch rate, but not significantly affect the shape of the evolved surface, due to the relatively small variations in particle velocity and spatial distributions through the very narrow mask width opening, when compared to the abrasive jet spot size.…”

Section: Model Inputsmentioning

confidence: 98%

“…feature depth-to-width ratio, features [5]. In addition, AJM can be utilized to micro-machine polymers, such as poly-methyl-methacrylate (PMMA) and acrylonitrile-butadienestyrene (ABS) [6], and, using cryogenic cooling, elastomers such as poly-dimethyl-siloxane (PDMS) [7]. The main advantages of AJM are its low capital cost, its exceptionally high etch speed in ceramics, and its ability to machine multi-level, anisotropic patterns and suspended features with relative ease.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A level set methodology for predicting the surface evolution of inclined masked micro-channels resulting from abrasive jet micro-machining at oblique incidence

Burzynski¹,

Papini²

2011

International Journal of Machine Tools and Manufacture

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Section: Model Inputsmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

A level set methodology for predicting the surface evolution of inclined masked micro-channels resulting from abrasive jet micro-machining at oblique incidence

Burzynski¹,

Papini²

2011

International Journal of Machine Tools and Manufacture

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“…This modification was necessary because, for unmasked ductile erosive systems, the 2D approximation for the scanning target (y = 0), used in (19), introduces a component of the erosive efficacy, V k v φ, in the y scanning direction that incorrectly causes the surface to grow in the x-z plane. This y component, originating from ( 4) and ( 6), cannot be eliminated from the 2D channel formulation, and ultimately causes the channel cross-section (x-z plane) to erode and widen, due to the surface tangential component of the erosion law in (6). In reality, this tangential component should mostly represent damage done by cutting and ploughing mechanisms in the y direction, and thus should primarily cause the surface to erode along the channel in the y direction.…”

Section: Comparisons With Experiments Of Section 3 511 Model Inputsmentioning

confidence: 99%

“…For example, AJM has been used to micro-machine glass to produce three-dimensional (3D) suspended micro-cantilever beams for inertial sensors [3], microfluidic channels [4] and other features with aspect ratios, AR (feature depth-to-width ratio), as high as 7 [5]. AJM can also be used to machine polymers, such as poly-methylmethacrylate (PMMA) and acrylonitrile-butadiene-styrene (ABS) [6], and with a recently developed cryogenic cooling technique, elastomers such as poly-dimethyl-siloxane (PDMS) [7]. AJM may also be suitable for the machining of micromoulding dies for the mass production of micro-components [8].…”

Section: Introductionmentioning

confidence: 99%

Level set methods for the modelling of surface evolution in the abrasive jet micromachining of features used in MEMS and microfluidic devices

Burzynski

Papini²

2010

J. Micromech. Microeng.

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The time-dependent evolution of an abrasive jet micro-machined surface is described by a partial differential equation which is difficult to solve using traditional analytical or numerical techniques. As a result, traditional surface advancement models can give incorrect predicted profile depths. In this work, level set methods were used to develop novel models of the abrasive jet machined surface evolution of unmasked and masked channels and holes in glass and polymethylmethacrylate. The level set-predicted eroded profiles were compared to those experimentally obtained, as well as to those predicted by existing analytical and computer models. For the majority of cases, the level set-predicted surface advancement was closer to the measured profiles than those predicted by existing analytical and computer models. The work demonstrates the potential of the level set methodology as a generally applicable tool for the prediction of abrasive jet machined surface profiles, and provides a foundation for future simulation of more complex abrasive jet micro-machining operations.

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“…For example, AJM can be used to micro-machine glass to produce three-dimensional (3D) suspended micro-cantilever beams for inertial sensors [4], microfluidic channels [5] and other features with aspect ratios (AR), feature depth-to-width ratios, as high as 7 [6]. AJM can also be used to machine polymers, such as poly-methyl-methacrylate (PMMA) and acrylonitrile-butadiene-styrene (ABS) [7], and with a recently developed cryogenic cooling technique, elastomers such as poly-dimethylsiloxane (PDMS) [8]. Polymers are of great interest for microfluidic and MEMS applications due to their low cost and the fact that they are available with a wide variety of properties [9].…”

Section: Motivationmentioning

confidence: 99%

Modelling surface evolution in abrasive jet micromachining using level set methods

Burzynski¹

2021

Preprint

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The time dependent surface evolution in abrasive jet micromachining (AJM) is described by a partial differential equation which is difficult to solve using analytical or traditional numerical techniques. These techniques can yield incorrect predicted profile evolution or fail altogether under certain conditions. More recently developed particle tracking cellular automaton simulations can address some of these limitations but are difficult to implement and are computationally expensive. In this work, level set methods (LSM) were introduced to develop novel surface evolution models to predict resulting feature shapes in AJM. Initially, a LSM-based numerical model was developed to predict the surface evolution of unmasked channels machined at normal and oblique jet impact angles (incidence), as well as masked micro-channels and micro-holes at normal incidence, in both brittle and ductile targets. This model was then extended to allow the prediction of: surface evolution of inclined masked micro-channels made using AJM at oblique incidence, where the developing profiles rapidly become multi-valued necessitating a more complex formulation; mask erosive wear by permitting surface evolution of both the mask and target micro-channels simultaneously at any jet incidence; and surface damage due to secondary particle strikes in brittle target micro-channels resulting from particle mask-to-target and target-to-target ricochets at any jet incidence. For all the models, a general ‘masking’ function was developed by applying previous concepts to model the adjustment to abrasive mass flux incident to the target or mask surfaces to reflect the range of particle sizes that are ‘visible’ to these surfaces. The models were also optimized for computational efficiency using an adaptive Narrow Band LSM scheme. All models were experimentally verified and, where possible, compared against existing models. Generally, good predictive capabilities and improvements over previous attempts in terms of feature prediction or execution time, were observed. The time dependent surface evolution in abrasive jet micromachining (AJM) is described by a partial differential equation which is difficult to solve using analytical or traditional numerical techniques. These techniques can yield incorrect predicted profile evolution or fail altogether under certain conditions. More recently developed particle tracking cellular automaton simulations can address some of these limitations but are difficult to implement and are computationally expensive.In this work, level set methods (LSM) were introduced to develop novel surface evolution models to predict resulting feature shapes in AJM. Initially, a LSM-based numerical model was developed to predict the surface evolution of unmasked channels machined at normal and oblique jet impact angles (incidence), as well as masked micro-channels and micro-holes at normal incidence, in both brittle and ductile targets.This model was then extended to allow the prediction of: surface evolution of inclined masked micro-channels made using AJM at oblique incidence, where the developing profiles rapidly become multi-valued necessitating a more complex formulation; mask erosive wear by permitting surface evolution of both the mask and target micro-channels simultaneously at any jet incidence; and surface damage due to secondary particle strikes in brittle target micro-channels resulting from particle mask-to-target and target-to-target ricochets at any jet incidence. For all the models, a general ‘masking’ functionwas developed by applying previous concepts to model the adjustment to abrasive mass flux incident to the target or mask surfaces to reflect the range of particle sizes that are ‘visible’ to these surfaces. The models were also optimized for computational efficiency using an adaptive Narrow Band LSM scheme.All models were experimentally verified and, where possible, compared against existing models. Generally, good predictive capabilities and improvements over previous attempts in terms of feature prediction or execution time, were observed.The proposed LSM-based models can be practical assistive tools during the micro-fabrication of complex MEMS and microfluidic devices using AJM.

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Present Situation and Developing Trend of Abrasive Air Jet Micromachining

Cited by 5 publications

References 13 publications

A level set methodology for predicting the surface evolution of inclined masked micro-channels resulting from abrasive jet micro-machining at oblique incidence

A level set methodology for predicting the surface evolution of inclined masked micro-channels resulting from abrasive jet micro-machining at oblique incidence

Level set methods for the modelling of surface evolution in the abrasive jet micromachining of features used in MEMS and microfluidic devices

Modelling surface evolution in abrasive jet micromachining using level set methods

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