A level set methodology for predicting the surface evolution of inclined masked micro-channels resulting from abrasive jet micro-machining at oblique incidence

Burzynski, T.; Papini, M.

doi:10.1016/j.ijmachtools.2011.03.003

Cited by 17 publications

(45 citation statements)

References 25 publications

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“…From the analytical modelling point of view, a geometrical model for AWJ milling at 90 • incidence angle is presented by Axinte et al (2010). A similar erosional model is also manifested by Burzynski and Papini (2011) for predicting the footprint of a movable air powder-blasted jet. However, a drawback in these approaches is that they need special experimentally determined constants to calibrate/run the models.…”

Section: Introductionmentioning

confidence: 99%

Finite element modelling of abrasive waterjet milled footprints

Anwar

Axinte

Becker

2013

Journal of Materials Processing Technology

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Section: Introductionmentioning

confidence: 99%

Finite element modelling of abrasive waterjet milled footprints

Anwar

Axinte

Becker

2013

Journal of Materials Processing Technology

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“…The agreement between LSM-predicted and measured surface evolution, as well as the feasibility of the model in predicting AJM surface evolution of inclined masked features given its present assumptions, is discussed. The majority of the material in this chapter has been published in [46].…”

Section: Motivationmentioning

confidence: 99%

Modelling surface evolution in abrasive jet micromachining using level set methods

Burzynski¹

2021

Preprint

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The time dependent surface evolution in abrasive jet micromachining (AJM) is described by a partial differential equation which is difficult to solve using analytical or traditional numerical techniques. These techniques can yield incorrect predicted profile evolution or fail altogether under certain conditions. More recently developed particle tracking cellular automaton simulations can address some of these limitations but are difficult to implement and are computationally expensive. In this work, level set methods (LSM) were introduced to develop novel surface evolution models to predict resulting feature shapes in AJM. Initially, a LSM-based numerical model was developed to predict the surface evolution of unmasked channels machined at normal and oblique jet impact angles (incidence), as well as masked micro-channels and micro-holes at normal incidence, in both brittle and ductile targets. This model was then extended to allow the prediction of: surface evolution of inclined masked micro-channels made using AJM at oblique incidence, where the developing profiles rapidly become multi-valued necessitating a more complex formulation; mask erosive wear by permitting surface evolution of both the mask and target micro-channels simultaneously at any jet incidence; and surface damage due to secondary particle strikes in brittle target micro-channels resulting from particle mask-to-target and target-to-target ricochets at any jet incidence. For all the models, a general ‘masking’ function was developed by applying previous concepts to model the adjustment to abrasive mass flux incident to the target or mask surfaces to reflect the range of particle sizes that are ‘visible’ to these surfaces. The models were also optimized for computational efficiency using an adaptive Narrow Band LSM scheme. All models were experimentally verified and, where possible, compared against existing models. Generally, good predictive capabilities and improvements over previous attempts in terms of feature prediction or execution time, were observed. The time dependent surface evolution in abrasive jet micromachining (AJM) is described by a partial differential equation which is difficult to solve using analytical or traditional numerical techniques. These techniques can yield incorrect predicted profile evolution or fail altogether under certain conditions. More recently developed particle tracking cellular automaton simulations can address some of these limitations but are difficult to implement and are computationally expensive.In this work, level set methods (LSM) were introduced to develop novel surface evolution models to predict resulting feature shapes in AJM. Initially, a LSM-based numerical model was developed to predict the surface evolution of unmasked channels machined at normal and oblique jet impact angles (incidence), as well as masked micro-channels and micro-holes at normal incidence, in both brittle and ductile targets.This model was then extended to allow the prediction of: surface evolution of inclined masked micro-channels made using AJM at oblique incidence, where the developing profiles rapidly become multi-valued necessitating a more complex formulation; mask erosive wear by permitting surface evolution of both the mask and target micro-channels simultaneously at any jet incidence; and surface damage due to secondary particle strikes in brittle target micro-channels resulting from particle mask-to-target and target-to-target ricochets at any jet incidence. For all the models, a general ‘masking’ functionwas developed by applying previous concepts to model the adjustment to abrasive mass flux incident to the target or mask surfaces to reflect the range of particle sizes that are ‘visible’ to these surfaces. The models were also optimized for computational efficiency using an adaptive Narrow Band LSM scheme.All models were experimentally verified and, where possible, compared against existing models. Generally, good predictive capabilities and improvements over previous attempts in terms of feature prediction or execution time, were observed.The proposed LSM-based models can be practical assistive tools during the micro-fabrication of complex MEMS and microfluidic devices using AJM.

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“…In particular, Ciampini and Papini [12] developed a simulation which virtually launches and tracks particles, allowing particle size, secondary particle impacts and particle-to-mask ricochet effects to be simulated. A more detailed review of previous analytical and CA modelling of AJM is given in [7,13].…”

Section: Previous Workmentioning

confidence: 99%

“…depth/width), features and microfluidic channels in both glass and polymers (e.g. polymethyl-methacrylate (PMMA)) [4][5][6][7]. AJM has the ability to very rapidly etch ceramics, has a relatively low associated capital expenditure and has the capability to micro-machine multi-level, anisotropic patterns and suspended structures with relative ease.…”

Section: Introductionmentioning

confidence: 99%

A level set methodology for predicting the effect of mask wear on surface evolution of features in abrasive jet micro-machining

Burzynski¹,

Papini²

2012

J. Micromech. Microeng.

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A previous implementation of narrow-band level set methodology developed by the authors was extended to allow for the modelling of mask erosive wear in abrasive jet micro-machining (AJM). The model permits the prediction of the surface evolution of both the mask and the target simultaneously, by representing them as a hybrid and continuous mask-target surface. The model also accounts for the change in abrasive mass flux incident to both the target surface and, for the first time, the eroding mask edge, that is brought about by the presence of the mask edge itself. The predictions of the channel surface and eroded mask profiles were compared with measurements on channels machined in both glass and poly-methyl-methacrylate (PMMA) targets at both normal and oblique incidence, using tempered steel and elastomeric masks. A much better agreement between the predicted and measured profiles was found when mask wear was taken into account. Mask wear generally resulted in wider and deeper glass target profiles and wider PMMA target profiles, respectively, when compared to cases where no mask wear was present. This work has important implications for the AJM of complex MEMS and microfluidic devices that require longer machining times.

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A level set methodology for predicting the surface evolution of inclined masked micro-channels resulting from abrasive jet micro-machining at oblique incidence

Cited by 17 publications

References 25 publications

Finite element modelling of abrasive waterjet milled footprints

Finite element modelling of abrasive waterjet milled footprints

Modelling surface evolution in abrasive jet micromachining using level set methods

A level set methodology for predicting the effect of mask wear on surface evolution of features in abrasive jet micro-machining

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