Preparation of vanadium oxide thin films with high temperature coefficient of resistance by facing targets d.c. reactive sputtering and annealing process

Nanostructured V2O5 thin films deposited at low sputtering power

“…Among these deposition techniques, reactive rf/dc magnetron sputtering is highly preferred for depositing the thin films for the uncooled microbolometer applications because of its merit, such as, high uniformity, highly homogeneous, controllability over the partial pressure of oxygen and ease of operation. Several authors [1,14,15] have investigated the physical properties of sputtered V 2 O 5 thin films deposited at higher sputtering power (above 200 W) or substrate temperature (above 350 1C), which cause complexity in CMOS fabrication of the microbolometer.…”

Group IV Materials for Low Cost and High Performance Bolometers

“…These oxide layers were deposited by reactive dc sputtering followed by an annealing treatment (673K). The analysis showed a TCR value of ∼−4.4% •K −1 and a sheet resistance of 20 k Ω/square (Dai, X. Wang, He, Huang, & Yi, 2008;Lv et al, 2007). Although these results indicate a breakthrough for material performance, this material is not suitable for micro-machining process on Si and the fabrication of bolometers due to high temperature budget.…”

“…Today, commonly used thermistor materials such as vanadium oxide (VO x ), amorphous, and polycrystalline semiconductors demonstrate moderate noise levels and TCR values around 2%-4% (Lv, Hu, Wu, & Liu, 2007;Moreno, Kosarev, Torres, & Ambrosio, 2007). Recent studies have proposed single crystalline (sc) SiGe as a thermistor material (Di Benedetto, Kolahdouz, Malm, Ostling, & H. H. Radamson, 2009;Vieider et al, 2007;S.…”

“…Most of these efforts have striven to increase SNR and the thermal response of the detector. For bolometers, 1/f noise is the main source of noise (Lv et al, 2007).…”

Flexible platinum temperature sensor embedded in polyimide (PI) films for curved surface temperature monitoring applications: skin temperature of human body

“…Therefore, both Ptthin-film-based temperature sensors and polymer-film-based temperature sensors can be used in research to optimize and enhance the properties and create flexible and wearable applications. Additionally, temperature sensors using metal alloy (10,11) or ceramic (12)(13)(14) were developed to obtain high TCR. However, those sensors were fabricated on rigid substrates.…”