Preparation of the Nanodiamond@SiO₂ Abrasive and its Effect on the Polishing Performance of Zirconia Ceramics

Abstract

For the purpose of achieving the industrial requirement of efficient and high precision polishing of zirconia ceramics, nanodiamond@SiO2 abrasives were synthesized by a simple method using tetraethyl orthosilicate as raw materials. As observed in the transmission electron microscopy results, the composite abrasives showed a homogeneous and dense silica coating layer. It was confirmed by Fourier transform infrared spectroscopy and X-ray diffraction spectroscopy that the composite abrasives have a core-shell structure with a diamond core and a silica shell. According to the Zeta potential analysis, the dispersion stability of composite particles was improved compared to that of the pure nanodiamond particles. The chemical mechanical polishing results show that the polishing performances of composite abrasives on zirconia ceramics are better than that of the pure nanodiamond abrasives. The material removal rate of the composite particles is 2.184 µm/h, and the surface roughness of the polished zirconia ceramics is 1.055 nm, which was 140% higher and 89% lower than that of pure nanodiamond abrasives, respectively. Furthermore, the polishing mechanism was explored by X-ray photoelectron spectroscopy, friction coefficient meter, and dynamic contact angle test.

Engineering SiO₂ Nanoparticles: A Perspective on Chemical Mechanical Planarization Slurry for Advanced Semiconductor Processing

“…In this experiment, while the polishing rate was lower for the core-shell composite compared with alumina, the roughness decreased by approximately 33 %. Ding et al (2022) employed a silica-diamond composite for ZrO 2 CMP. In this case, a core-shell composite using silica as the core had a higher zeta potential compared with a nanodiamond, ranging from -35 mV to -55 mV, leading to improvements in both removal rate and roughness, as confirmed by CMP results.…”

Preparation and Mechanical Properties of Core–Shell PS&CeO2 Composite Abrasive Particles

“…Core–shell composite particles are frequently employed to meet the specific requirements of ultrasonic processing and variable load environments. These particles consist of a resilient polymer core surrounded by a hard exterior layer, which ensures optimal energy absorption and surface contact properties. − In the field of chemical mechanical polishing, core–shell abrasive particles are superior to those of traditional inorganic abrasives.…”