Preparation of metal oxide nanoparticles by gas aggregation cluster source

Palladium clusters are grown using a gas aggregation source coupled to magnetron sputtering with oxygen as reactive gas. Clusters with a mean size between 2.6 and 3.3 nm are obtained. Oxygen enhances the deposition rate by a factor 3 (from 4 to 11 mg/h cm −2 ) at the expense of the formation of larger clusters and the modification of the cluster composition. An increase of the oxygen flow rate induces a transition from Pd to PdO, this transition is followed by the formation of 2D structural defects in the crystals as displayed by grazing incidence X-ray diffraction and high resolution transmission electron microscopy micrographs. Oxygen interacts with both the target and the sputtered atoms, highlighting that the target oxidation could be considered as the key step that drives the cluster growth processes. K E Y W O R D S clusters, gas aggregation source, magnetron sputtering, nanofabrication Plasma Process Polym. 2019;16:e1900006 www.plasma-polymers.com

Section: Resultsmentioning

confidence: 99%

The role of oxygen on the growth of palladium clusters synthesized by gas aggregation source

Chamorro‐Coral

Caillard

Brault

et al. 2019

“…This equipment became popular as a gas aggregation cluster source (GAS) . Afterwards, GASes were successfully applied for the production of semiconductor, insulator, and plasma polymer NPs . The application of two or even three magnetrons in the same aggregation chamber enabled the production of heterogeneous NPs.…”

Section: Introductionmentioning

confidence: 99%

“…[1,2] Afterwards, GASes were successfully applied for the production of semiconductor, insulator, and plasma polymer NPs. [3][4][5][6] The application of two or even three magnetrons in the same aggregation chamber [7,8] enabled the production of heterogeneous NPs. In spite of the huge number of studies that dealt with the gas phase preparation of metal NPs and their applications, [9][10][11][12][13][14][15][16] little concern has been raised with regard to the processes occurring inside the aggregation chamber.…”

mentioning

confidence: 99%

The evolution of Ag nanoparticles inside a gas aggregation cluster source

Nikitin

Hanuš

Ali-Ogly

et al. 2019

Self Cite

In‐situ UV–Vis spectroscopy was used for investigating the evolution of silver nanoparticles (NPs) inside the gas aggregation cluster source (GAS). The light beam probed the interior of the GAS at different distances from the magnetron. Plasmon resonance was detected at 365 nm, with the highest intensity found close to the magnetron due to the NP trapping. Time‐resolved measurements revealed that after the discharge switch off the majority of trapped NPs fly out of the GAS. Part of them is redeposited onto the center of the target due to the electrostatic force. NPs collected at the distance of 20 mm and further from the magnetron demonstrate gradual decrease of the size, pointing to the loss of bigger NPs on the walls.

“…The latter enabled production of complex functional nanocomposite or nanostructured materials with different architectures including classical nanocomposites or multi‐layered structures, coatings with dual‐scale roughness, or materials with horizontal gradients of NPs embedded into a matrix material . Furthermore, the GAS systems were proved to be highly flexible also in terms of composition of produced NPs as they enabled fabrication of metallic, metal‐oxide as well as polymeric NPs …”

Section: Introductionmentioning

confidence: 99%

Core@shell Cu/hydrocarbon plasma polymer nanoparticles prepared by gas aggregation cluster source followed by in‐flight plasma polymer coating

Kylián

Kuzminova

Vaydulych

et al. 2017

Self Cite

Core@shell Cu/hydrocarbon plasma polymer nanoparticles (NPs) have been prepared using a gas aggregation cluster source followed by in‐flight plasma polymer coating of produced Cu NPs. Conventional plasma polymerization of vapors of n‐Hexane or acetone has been applied. It is shown that this strategy for core@shell NPs production enables to achieve homogeneous shells with thickness in nanometer scale without impact on the properties of metallic cores (crystallinity, optical properties). In addition, it has been proved that the chemical properties of shells may be controlled by use of different organic precursors that enables production of NPs with different wettabilities.