Preparation of Lithium Niobate Thin Film by Thermal Chemical Vapor Deposition

Abstract

Additions to the Spectra Lila, Lizb and LiZla.Six new spectral lines have been observed in the lithium spectrum between 200 nm and 600 nm. Possible classifications are given and discussed.

Identification of LiNbO3, LiNb3O8and Li3NbO4phases in thin films synthesized with different deposition techniques by means of XRD and Raman spectroscopy

“…C-axis oriented LiNbO 3 films are of special interest due to their high electro-optic and nonlinear optical properties and good piezoelectric properties along this crystallographic direction, while LN films with c-axis out of surface normal or in the substrate plane are desired for the acoustical applications. Various deposition techniques have been tested for the growth of LiNbO 3 films: pulsed laser deposition (PLD) [5,6], sol-gel [7,8], rf-sputtering [9,10], metal organic chemical vapor deposition (MOCVD) [11][12][13][14][15][16][17][18][19]. MOCVD has advantages over other techniques; such as easier compositional/stoichiometry control, easy up-scaling and superior step coverage.…”

Theoretical valley-polarized subgap transport and intravalley pairing states in a silicene-based antiferromagnet–superconductor junction

“…In the bulk-SC model, a conventional s-wave SC such as Al or Nb [62,63] can be used as the bulk SC metal, with a gap magnitude of ∆ 0 ∼ 1.03 meV [64]. Particularly, Al or Nb can be fabricated as thin film materials by physical or chemical vapor deposition [65][66][67]. These thin films have some disparities in thickness dimension compared to mono-layer films, but they can still be considered as candidate materials to construct a more ideal junction with silicene.…”

Combinatorial Chemical Vapor Deposition of Lithium Niobate Thin Films

“…The systematic study of deposition with the Li(OBu t ) precursor is more challenging since lithium oxide is not a stable compound and might produce lithium carbonate and lithium silicate [17]. Thus, the systematic study was carried out for a linear impinging rate gradient of Li(OBu t ) in a co-deposition with niobium oxide with a uniform impinging flux of Nb(OEt) 4 (dmae) on the substrate (150 mm Si).…”