1979
DOI: 10.1016/0029-554x(79)90596-2
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Preparation of implanted nitrogen targets

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Cited by 15 publications
(9 citation statements)
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“…As a result, we have chosen to calculate the standard deviation in the average via a bootstrap method (see e.g., [29]), using the Visual Averaging Library tool [30]. Combining statistical and systematic uncertainties, the relative concentration of 14 N is 0.600 (13), which is in excellent agreement with a previous measurement of 0.61(2) [31]. The corresponding ratio of tantalum to nitrogen is 0.667(21) (note that the uncertainties in the nitrogen and tantalum concentrations are correlated and do not simply add).…”
Section: B Targetssupporting
confidence: 62%
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“…As a result, we have chosen to calculate the standard deviation in the average via a bootstrap method (see e.g., [29]), using the Visual Averaging Library tool [30]. Combining statistical and systematic uncertainties, the relative concentration of 14 N is 0.600 (13), which is in excellent agreement with a previous measurement of 0.61(2) [31]. The corresponding ratio of tantalum to nitrogen is 0.667(21) (note that the uncertainties in the nitrogen and tantalum concentrations are correlated and do not simply add).…”
Section: B Targetssupporting
confidence: 62%
“…Eq. 1 from Ref [31]) to measure the stoichiometry, which is based on the assumption that the stopping power is nearly constant over the width of the implanted region. Our RBS analyses indicate that the nitrogen concentration, and thus the stopping power, does vary and consequently we have used our current value of Ta/N = 0.667 (21).…”
Section: Appendix: Review Of Previous Resultsmentioning
confidence: 99%
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“…A proton energy of E p = 318 keV, where the thick-target yield plateau is still almost constant, was chosen for all the measurements. The target stoichiometry after the implantation reaches saturation should be equal to that of the compound Ta 2 N 3 [14,15].…”
Section: Experimental Setup and Experimental Proceduresmentioning
confidence: 99%
“…The detailed study of implanted helium is made difficult owing t o the relatively small interaction of helium with X-rays or neutrons. [9]. This indirect approach is satisfactory for high dose implants and has been employed for the present work.…”
Section: Introductionmentioning
confidence: 92%