Preparation of  3D glass ceramic micro-/nanostructures by combining laser nanolithography with calcination (Conference Presentation)

Merkininkaitė, Greta; Aleksandravičius, Edvinas; Gailevičius, Darius; Varapnickas, Simonas; Malinauskas, Mangirdas; Šakirzanovas, Simas

doi:10.1117/12.2555838

Cited by 5 publications

(9 citation statements)

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“…The process of structuring 3D geometries through MPL and heat treatment as a post-processing tool involves several steps. Hybrid organic-inorganic material SZ2080 was chosen as a From the author G. Merkininkait ̇e with her permission to adapt it for this article [81] b) Optical images of 3D-micro scaffolds pre-and post-calcination in 1400 °C atmosphere. Reproduced with permission.…”

Section: Methodsmentioning

confidence: 99%

Fabrication of Glass‐Ceramic 3D Micro‐Optics by Combining Laser Lithography and Calcination

Balčas

Malinauskas

Farsari

et al. 2023

Adv Funct Materials

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This perspective is an overview of a recent direction in optical 3D printing, where polymerization of crosslinkable materials and nanomaterial fillers can be guided to the final structures and new composites via high temperature annealing (HTA). Defining 3D nano/micro‐structures by ultrafast laser direct writing and tailoring their precursor composition with subsequent tunability of the final properties during 750–1500 °C HTA step takes place at the large surface‐to‐volume ratio conditions favoring efficient pyrolysis and calcination, which are required for exchange of chemical materials/gases between glass/ceramic phase and surrounding. Previously, unexplored inorganic material formation conditions in terms of fast thermal quenching, composition mixing and surface tension guided formation can be harnessed by glass making for creation of new materials endowed with preferable technical properties. An immediate application perspective for a high durability, integrated, and active 3D micro‐optics is foreseen.

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Section: Methodsmentioning

confidence: 99%

Fabrication of Glass‐Ceramic 3D Micro‐Optics by Combining Laser Lithography and Calcination

Balčas

Malinauskas

Farsari

et al. 2023

Adv Funct Materials

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“…The second endothermal mass loss at 350< t < 600 °C temperature range indicates the decomposition of the organic moiety. [ 33 ] During this step, the mass loss increased with increasing organic content in the prepared material. Sample with the most organic content, MTMS:MAPTMS = 7:3, resulted in highest mass loss that is 17.7%.…”

Section: Resultsmentioning

confidence: 99%

Additive Manufacturing of SiOC, SiC, and Si₃N₄ Ceramic 3D Microstructures

et al. 2023

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Herein, the fabrication of hard ceramic SiOC 3D microstructures by precursor synthesis, laser lithography, and pyrolysis combination is proposed. Precursors are hybrid organosilicon materials prepared via sol–gel method using trimethoxymethylsilane and 3‐(trimethoxysilyl)propyl methacrylate, which has an acrylate functional group enabling laser photopolymerization process. Hard 3D ceramic structures (hardness up to ≈15 GPa, reduced elastic modulus ≈105 GPa) from soft organometallic derivatives are obtained after high‐temperature pyrolysis under nitrogen atmosphere. The advantage of the proposed method is the absence of shrinkage defects leading to a uniform repetitive decrease in the volume of printed microstructures. In contrast to slurry‐based printing technology, the proposed method is focused on homogeneous monolithic molecular resins resulting in visual smooth surfaces of prepared microstructures. Moreover, the printing resolution of the proposed method is substantially improved through the absence of predispersed ceramic microparticles in mixtures, which is a necessary element in a slurry‐based technology.

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Section: Pyrolysis / Calcinationmentioning

confidence: 99%

“…The treatment method comes down to choosing either oxygen containing atmosphere-calcination, or inert atmosphere-pyrolysis performed in argon, nitrogen gas or vacuum. [448] Pyrolysis allows carbonization of structures made from organic resins such as PMMA, PETA based (e.g., IP-Dip) and epoxy class materials like SU-8 (Figure 8b). [451] They feature the highest downscaling rate reaching 10% as a record value.…”

Section: Pyrolysis/calcinationmentioning

confidence: 99%

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Wang

Zhang

Ladika

et al. 2023

Adv Funct Materials

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The rapid development of additive manufacturing has fueled a revolution in various research fields and industrial applications. Among the myriad of advanced three-dimensional printing techniques, two-photon polymerization lithography (TPL) uniquely offers a significant electron microscope (SEM) images of SMP structures before and after programming and after recovery, respectively. Reproduced under terms of the CC-BY license. [114] Copyright 2021, The Authors, published by Nature Publishing Group. b) Stiff SMPs for high-resolution reversible nanophotonics. I-II) The deformed and recovered nanopillars under optical microscope and SEM, respectively. Reproduced with permission. [115] Copyright 2022, American Chemical Society. c) Vapor-responsive photonic arrays. I-IV) Optical image of a grid array in air, in water vapors ~ 20 s, saturation with water vapors ~ 88s, and after the gas flow stopped, respectively.Reproduced under terms of the CC-BY license. [116] Copyright 2021, The Authors, published by Royal Society of Chemistry. d) SEM image of a 40-layer face-cantered-cubic photonic structure printed by SU-8. Reproduced with permission. [117] Copyright 2004, Nature Publishing Group. e) SEM image of helices with an axial pitch of 800 nm and a radius of 800 nm fabricated by the two-step absorption photoresist. Reproduced with permission. [118]

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Preparation of 3D glass ceramic micro-/nanostructures by combining laser nanolithography with calcination (Conference Presentation)

Cited by 5 publications

References 0 publications

Fabrication of Glass‐Ceramic 3D Micro‐Optics by Combining Laser Lithography and Calcination

Fabrication of Glass‐Ceramic 3D Micro‐Optics by Combining Laser Lithography and Calcination

Additive Manufacturing of SiOC, SiC, and Si₃N₄ Ceramic 3D Microstructures

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

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Preparation of 3D glass ceramic micro-/nanostructures by combining laser nanolithography with calcination (Conference Presentation)

Cited by 5 publications

References 0 publications

Fabrication of Glass‐Ceramic 3D Micro‐Optics by Combining Laser Lithography and Calcination

Fabrication of Glass‐Ceramic 3D Micro‐Optics by Combining Laser Lithography and Calcination

Additive Manufacturing of SiOC, SiC, and Si3N4 Ceramic 3D Microstructures

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Contact Info

Product

Resources

About

Additive Manufacturing of SiOC, SiC, and Si₃N₄ Ceramic 3D Microstructures