2001
DOI: 10.1116/1.1340659
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Preparation and properties of transparent conductive aluminum-doped zinc oxide thin films by sol–gel process

Abstract: Highly conductive and transparent aluminum-doped zinc oxide thin films have been prepared from the solution of zinc acetate and aluminum nitrate in ethanol by the sol–gel process. The effect of changing the aluminum-to-zinc ratio from 0 to 5 at. % and annealing temperature from 0 °C to 700 °C in air has been investigated. The resistivities of thin films were measured as a function of annealing temperature and also as a function of aluminum dopant concentration in the solution. As-deposited films have high resi… Show more

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Cited by 152 publications
(43 citation statements)
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“…Conductivity increases from 2.12 Â 10 À 3 to 2.35 Â 10 À 3 S/cm with an increase in the Al concentration from 0.5 to 1.0 at%, and then drops to 2.06 Â 10 À 3 S/cm at 2.0 at%. Such trends are not unusual and are frequently interpreted as a neutralization of the dopant atom [17,[27][28][29][30]33]. The annealing temperature has a much stronger influence on the conductivity due to recrystallization of the films.…”
Section: Characterization Of Zno Tio X and Azomentioning
confidence: 95%
See 1 more Smart Citation
“…Conductivity increases from 2.12 Â 10 À 3 to 2.35 Â 10 À 3 S/cm with an increase in the Al concentration from 0.5 to 1.0 at%, and then drops to 2.06 Â 10 À 3 S/cm at 2.0 at%. Such trends are not unusual and are frequently interpreted as a neutralization of the dopant atom [17,[27][28][29][30]33]. The annealing temperature has a much stronger influence on the conductivity due to recrystallization of the films.…”
Section: Characterization Of Zno Tio X and Azomentioning
confidence: 95%
“…[27]. 2.2 g of Zinc acetate (ZnAc Á 2H 2 O) and 0.016 g (1 at%) of aluminum hydroxide acetate (HOAl(C 2 H 3 O 2 ) 2 ) were mixed together and dissolved in 100 ml of ethanol.…”
Section: Materials Synthesismentioning
confidence: 99%
“…These differences were also caused by the film thickness [38,39]. We concluded that ZnO had good optical transparency in the visible region [40,19]. The absorption and optical band gap are depicted in Fig.…”
Section: Optical Propertiesmentioning
confidence: 96%
“…ZnO films have been grown by several techniques. These methods are spray pyrolysis, either pneumatic [11] or ultrasonic [12,13], chemical vapour deposition [14][15][16], molecular beam epitaxy [17,18], sol-gel [19], pulsed laser deposition [20], sputtering [21][22][23][24][25], hydrothermal technique [26] and wet chemical process such as chemical vapor deposition (CVD), homogenous precipitation method under solvothermal condition [27][28][29].…”
Section: Introductionmentioning
confidence: 99%
“…A number of techniques, chemical vapor deposition [16], spraypyrolysis [17], molecular beam epitaxy [18], vacuum arc deposition [19], magnetron sputtering [20][21][22] and pulsed laser deposition (PLD) [23], have been involved in the growth of ZnO thin films. Sol-gel method has emerged as an important growth technique because it enables the surface modification of zinc oxide with selected organic compounds.…”
Section: Introductionmentioning
confidence: 99%