Preparation and properties of hard i-C and i-BN coatings

Effect of source gas chemistry on tribological performance of diamond-like carbon films

“…[1][2][3]. DLC films can be deposited at fairly low temperatures and at high deposition rates by a variety of methods, including ionbeam deposition, plasma source ion implantation, DC and RF magnetron sputtering, arc-physical vapor deposition (arc-PVD), piasma-enhanced chemical vapor deposition (PECVD), and laser ablation [4][5][6][7][8][9][10].…”

Friction and wear performance of diamond-like carbon films grown in various source gas plasmas

“…[1][2][3]. DLC films can be deposited at temperatures ranging from subzero to 300"C and at fair]y high deposition rates by a variety of methods, including ion-beam deposition, DC and RF magnetron sputtering, arc-physical vapor deposition (arc-PYD), plasma-enhanced chemical vapor deposition (PECVD), and laser ablation [4][5][6][7][8]. Depending on the deposition method and carbon source, large amounts of hydrogen may be present within the amorphous structure of DLC films [1,3].…”

Tribological Characteristics of Diamond-Like Carbon Based Double-Layers Film Prepared by DC-Plasma Ionization Deposition

“…Film deposition operation was carried out using a DC-plasma ionization deposition apparatus [11,12]. The schematic diagram of the process chamber of the apparatus is shown in Fig.…”